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X-ray diffractometer stage for in situ structural analysis of thin films

Johnson, R. W. and Johnson, W. L. (1988) X-ray diffractometer stage for in situ structural analysis of thin films. Review of Scientific Instruments, 59 (12). pp. 2568-2572. ISSN 0034-6748. http://resolver.caltech.edu/CaltechAUTHORS:JOHrsi88

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Abstract

A theta-two theta x-ray diffractometer stage has been developed for in situ structural characterization of thin-film samples. This stage integrates an ultrahigh vacuum dc ion-beam thin-film sample preparation chamber with the Siemens D500 x-ray diffractometer. In vacuo sample translation and manipulation is provided. The stage incorporates resistive heating to 900 K and liquid nitrogen cooling to 150 K. The sample theta rotation is transmitted into the vacuum chamber by a rotary feedthrough. X rays enter the vacuum chamber through a beryllium window with allowed reflection angles from 0 to +168° two-theta.


Item Type:Article
Additional Information:Copyright © 1988 American Institute of Physics (Received 7 July 1988; accepted 19 August 1988) This work has been supported by the National Science Foundation-Materials Research Groups Grant No. DMR 8421119.
Subject Keywords:X–RAY DIFFRACTION; SAMPLE HOLDERS; DESIGN; X–RAY DIFFRACTION ANALYSIS; THIN FILMS; ULTRAHIGH VACUUM; CRYOGENICS; AMORPHIZATION
Record Number:CaltechAUTHORS:JOHrsi88
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:JOHrsi88
Alternative URL:http://dx.doi.org/10.1063/1.1139899
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:5770
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:01 Nov 2006
Last Modified:26 Dec 2012 09:15

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