CaltechAUTHORS
  A Caltech Library Service

Microfabricated torsional actuator using self-aligned plastic deformation

Kim, Jongbaeg and Choo, Hyuck and Lin, Liwei and Muller, Richard S. (2003) Microfabricated torsional actuator using self-aligned plastic deformation. In: 12th International Conference on TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems 2003. Vol.2. IEEE , Piscataway, NJ, pp. 1015-1018. ISBN 0-7803-7731-1 . http://resolver.caltech.edu/CaltechAUTHORS:20150730-144046651

[img] PDF - Published Version
See Usage Policy.

370Kb

Use this Persistent URL to link to this item: http://resolver.caltech.edu/CaltechAUTHORS:20150730-144046651

Abstract

We describe microfabricated torsional actuators that are made using self-aligned plastic deformation in a batch process. The microactuators are formed in single-crystal silicon and driven by vertical comb-drives. Structures have been built that resonate at frequencies between 1.90 and 5.33 kHz achieving scanning angles up to 19.2 degrees with driving voltages of 40 V_(dc) plus 13 V_(ac). After continuous testing of 5 billion cycles at the maximum scanning angle, there appears to be no observable degradation or fatigue of the plastically deformed silicon tors ion bars. We present measured results obtained with MEMS scanning mirrors; the actuators may be useful for many other MEMS applications.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1109/SENSOR.2003.1216940DOIArticle
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=1216940PublisherArticle
ORCID:
AuthorORCID
Choo, Hyuck0000-0002-8903-7939
Additional Information:© 2003 IEEE. Paper 3A2.3.
Record Number:CaltechAUTHORS:20150730-144046651
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20150730-144046651
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:59089
Collection:CaltechAUTHORS
Deposited By: Kristin Buxton
Deposited On:06 Aug 2015 19:19
Last Modified:08 May 2017 22:58

Repository Staff Only: item control page