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Optical properties of microlenses fabricated using hydrophobic effects and polymer-jet-printing technology

Choo, Hyuck and Muller, Richard S. (2003) Optical properties of microlenses fabricated using hydrophobic effects and polymer-jet-printing technology. In: 2003 IEEE/LEOS International Conference on Optical MEMS. IEEE , Piscataway, NJ, pp. 169-170. ISBN 0-7803-7830-X . http://resolver.caltech.edu/CaltechAUTHORS:20150730-161445697

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Abstract

We describe high-precision microlenses with excellent optical characteristics. The lenses are formed precisely at desired locations on a wafer using a polymer-jet system in which hydrophobic effects define the lens diameter and surface tension creates a high-quality optical surface. To make the lenses, we defined hydrophilic circular regions at desired locations using photolithography to pattern a 0.2-pm thick Teflon (hydrophobic) layer on a quartz substrate, as shown in Figures 1 and 2. Then, using a polymer-microjet printing system (Figure 3), we dispense an exact amount of UV-curable polymer within hydrophilic circles to obtain microlenses having desired optical properties [ 13. Figure 4 shows that adjusting the volume of the UV-curable optical epoxy within a hydrophilic circle of a given diameter changes the curvature of the microlens. The step resolution of the microlens volume is determined by the average droplet size (~25pL) of the polymer-jet print head. This hybrid method enables us to define the locations and diameters of microlenses with a ±1 μm precision as well as to control the curvatures of the microlenses accurately.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1109/OMEMS.2003.1233519DOIArticle
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=1233519PublisherArticle
ORCID:
AuthorORCID
Choo, Hyuck0000-0002-8903-7939
Additional Information:© 2003 IEEE.
Record Number:CaltechAUTHORS:20150730-161445697
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20150730-161445697
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:59090
Collection:CaltechAUTHORS
Deposited By: Kristin Buxton
Deposited On:06 Aug 2015 19:14
Last Modified:08 May 2017 22:57

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