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Addressable Microlens Array to Improve Dynamic Range of Shack–Hartmann Sensors

Choo, Hyuck and Muller, Richard S. (2006) Addressable Microlens Array to Improve Dynamic Range of Shack–Hartmann Sensors. Journal of Microelectromechanical Systems, 15 (6). pp. 1555-1567. ISSN 1057-7157. http://resolver.caltech.edu/CaltechAUTHORS:20150730-165049120

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Abstract

In this paper, we have demonstrated an addressable array (5-by-5) of high-quality microlenses suitable for application in a Shack–Hartmann (SH) sensor in a microoptical system. Specific lenses in the array can be addressed using a new selection scheme (that we have designed, built, and tested) in which the mechanical resonant frequencies of individual lens-support carriages are varied. Thus, by changing the frequency of the drive voltage, we require only two electrical connections per row in the lens system to identify the selected lens by its resonating focal image. We show that using this lens-identification method will allow us to improve the dynamic range of SH sensors by a factor of 12–46 above values reported for conventional SH designs.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1109/JMEMS.2006.886011DOIArticle
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=4020257PublisherArticle
ORCID:
AuthorORCID
Choo, Hyuck0000-0002-8903-7939
Additional Information:© 2006 IEEE. Manuscript received February 7, 2006; revised June 27, 2006. This paper was presented in part at the 2004 Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island, SC June 6–10 2004. Subject Editor C. Hierold.
Subject Keywords:Dynamic range, frequency addressing, microlens, optical microelectromechanical systems (MEMS), Shack–Hartmann (SH) sensor
Record Number:CaltechAUTHORS:20150730-165049120
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20150730-165049120
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:59093
Collection:CaltechAUTHORS
Deposited By: Kristin Buxton
Deposited On:07 Aug 2015 18:44
Last Modified:08 May 2017 23:00

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