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Microfabricated Torsional Actuators Using Self-Aligned Plastic Deformation of Silicon

Kim, Jongbaeg and Choo, Hyuck and Lin, Liwei and Muller, Richard S. (2006) Microfabricated Torsional Actuators Using Self-Aligned Plastic Deformation of Silicon. Journal of Microelectromechanical Systems, 15 (3). pp. 553-562. ISSN 1057-7157. http://resolver.caltech.edu/CaltechAUTHORS:20150730-165132033

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Abstract

In this paper, we describe angular vertical-comb-drive torsional microactuators made in a new process that induces residual plastic deformation of single-crystal-silicon torsion bars. Critical dimensions of the vertically interdigitated moving-and fixed-comb actuators are self-aligned in the fabrication process and processed devices operate stably over a range of actuation voltages. We demonstrate MEMS scanning mirrors that resonate at 2.95kHz and achieve optical scan angles up to 19.2 degrees with driving voltages of 40V_(dc) plus 13V_(pp). After continuous testing of five billion cycles at the maximum scanning angle, we do not observe any signs of degradation in the plastically deformed silicon torsion bars.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1109/JMEMS.2006.876789DOIArticle
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=1638482PublisherArticle
ORCID:
AuthorORCID
Choo, Hyuck0000-0002-8903-7939
Additional Information:© 2006 IEEE. Manuscript received March 18, 2005; revised November 10, 2005. This paper was presented in part at the 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’03, Boston, MA, June 9–12, 2003). Subject Editor H. Zappe.
Record Number:CaltechAUTHORS:20150730-165132033
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20150730-165132033
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:59094
Collection:CaltechAUTHORS
Deposited By: Kristin Buxton
Deposited On:07 Aug 2015 18:47
Last Modified:08 May 2017 23:00

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