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Diamagnetically Levitated MEMS Accelerometers

Garmire, D. and Choo, H. and Kant, R. and Govindjee, S. and Séquin, C. H. and Muller, R. S. and Demmel, J. (2007) Diamagnetically Levitated MEMS Accelerometers. In: TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference. IEEE , Piscataway, NJ, pp. 1203-1206. ISBN 1-4244-0842-3 . http://resolver.caltech.edu/CaltechAUTHORS:20150731-110120088

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Abstract

We introduce the theory and a proof-of-concept design for MEMS-based, diamagnetically-levitated accelerometers. The theory includes an equation for determining the diamagnetic force above a checkerboard configuration of magnets. We demonstrate both electronic probing and a rapid MEMS-based interferometer technique for position sensing of the proof mass. Through a proof-of-concept design, we show electrostatic-measurement sensitivity achieving 34 μg at a 0.1 V sense signal and interferometer-measurement sensitivity achieving 6 μg for in-plane vibrations at 5 Hz. We conclude by outlining batch-fabrication steps to produce levitated accelerometers.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1109/SENSOR.2007.4300352DOIArticle
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=4300352PublisherArticle
ORCID:
AuthorORCID
Choo, H.0000-0002-8903-7939
Additional Information:© 2007 IEEE.
Subject Keywords:accelerometer, diamagnetism, levitation, fast phase-shifting interferometer
Record Number:CaltechAUTHORS:20150731-110120088
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20150731-110120088
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:59107
Collection:CaltechAUTHORS
Deposited By: Kristin Buxton
Deposited On:06 Aug 2015 18:51
Last Modified:08 May 2017 23:05

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