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Fabrication of pyramidal probes with various periodic patterns and a single nanopore

Choi, Seong Soo and Park, Myoung Jin and Han, Chul Hee and Oh, Sae Joong and Han, Sang Hun and Park, Nam Kyou and Kim, Yong-Sang and Choo, Hyuck (2015) Fabrication of pyramidal probes with various periodic patterns and a single nanopore. Journal of Vacuum Science and Technology B, B33 (6). Art. No. 06F203. ISSN 1071-1023. http://resolver.caltech.edu/CaltechAUTHORS:20160104-092346413

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Abstract

The nanometer-scale patterned pyramidal probe with an electron beam-induced nanopore on the pyramid apex is an excellent candidate for an optical biosensor. The nanoapertures surrounded with various periodic groove patterns on the pyramid sides were fabricated using a focused ion beam technique, where the optical characteristics of the fabricated apertures with rectangular, circular, and elliptical groove patterns were investigated. The elliptical groove patterns on the pyramid were designed to maintain an identical distance between the grooves and the apex for the surface waves and, among the three patterns, the authors observed the highest optical transmission from the elliptically patterned pyramidal probe. A 103-fold increase of the transmitted optical intensity was observed after patterning with elliptical grooves, even without an aperture on the pyramid apex. The nanopore on the apex of the pyramid was fabricated using electron beam irradiation and was optically characterized.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1116/1.4935560DOIArticle
http://scitation.aip.org/content/avs/journal/jvstb/33/6/10.1116/1.4935560PublisherArticle
ORCID:
AuthorORCID
Choo, Hyuck0000-0002-8903-7939
Additional Information:© 2015 American Vacuum Society. Received 19 June 2015; accepted 28 October 2015; published 13 November 2015. This work was partially supported by the Korea Research Foundation Grant (KRF Grant No. 2012R1A1A2002880) and by the Global Research Laboratory funding (GRL; Nanoplasmonic Integrated Circuits for Ultrafast Information Processing, KRF Grant No. K20815000003-2008-00580). In addition, the authors would like to thank Kyung Jin Park (National Nanofabrication Center, Daejeon, Korea) for the groove pattern fabrication on pyramid.
Funders:
Funding AgencyGrant Number
Korea Research Foundation (KRF)2012R1A1A2002880
Global Research LaboratoryUNSPECIFIED
Korea Research Foundation (KRF)K20815000003-2008-00580
Record Number:CaltechAUTHORS:20160104-092346413
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20160104-092346413
Official Citation: Fabrication of pyramidal probes with various periodic patterns and a single nanopore Seong Soo Choi, Myoung Jin Park, Chul Hee Han, Sae Joong Oh, Sang Hun Han, Nam Kyou Park, Yong-Sang Kim and Hyuck Choo J. Vac. Sci. Technol. B 33, 06F203 (2015); http://dx.doi.org/10.1116/1.4935560
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:63320
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:04 Jan 2016 19:07
Last Modified:08 May 2017 23:37

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