CaltechAUTHORS
  A Caltech Library Service

Electrically tunable collective response in a coupled micromechanical array

Buks, Eyal and Roukes, Michael L. (2002) Electrically tunable collective response in a coupled micromechanical array. Journal of Microelectromechanical Systems, 11 (6). pp. 802-807. ISSN 1057-7157. http://resolver.caltech.edu/CaltechAUTHORS:BUKjmems02

[img]
Preview
PDF
See Usage Policy.

1641Kb

Use this Persistent URL to link to this item: http://resolver.caltech.edu/CaltechAUTHORS:BUKjmems02

Abstract

We employ optical diffraction to study the mechanical properties of a grating array of suspended doubly clamped beams made of Au. The device allows application of electrostatic coupling between the beams that gives rise to formation of a band of normal modes of vibration (phonons). We parametrically excite these collective modes and study the response by measuring the diffraction signal. The results indicate that nonlinear effects strongly affect the dynamics of the system. Further optimization will allow employing similar systems for real-time mechanical spectrum analysis of electrical waveforms.


Item Type:Article
Additional Information:© Copyright 2002 IEEE. Reprinted with permission. Manuscript received September 17, 2001; revised February 5, 2002. [Posted online: 2002-12-16] This work was supported by DARPA MTO/MEMS under Grant DABT63-98-1-0012. The work of E. Buks was supported by the Rothschild fellowship and the R. A. Millikan postdoctoral fellowship at Caltech. Subject Editor R. T. Howe. The authors are grateful to K. Schwab for his assistance in sample fabrication and to R. Lifshitz for correcting an algebraic error in the manuscript. They also thank R. Lifshitz and M. Cross for helpful discussions.
Subject Keywords:Grating, MEMS, nonlinear, parametric resonance
Record Number:CaltechAUTHORS:BUKjmems02
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:BUKjmems02
Alternative URL:http://dx.doi.org/10.1109/JMEMS.2002.805056
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:7193
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:16 Jan 2007
Last Modified:26 Dec 2012 09:29

Repository Staff Only: item control page