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Generation of 1180 Å period gratings with a Xe ion laser

Zarem, H. A. and Hoenk, M. E. and Bridges, W. B. and Vahala, K. and Yariv, A. (1988) Generation of 1180 Å period gratings with a Xe ion laser. Electronics Letters, 24 (22). pp. 1366-1367. ISSN 0013-5194. http://resolver.caltech.edu/CaltechAUTHORS:ZARel88

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Abstract

Holographic lithography with the 2315 Å line of a xenon ion laser is used to produce gratings in polymethylmethacrylate. An 1180 Å period grating is made and examined with a scanning electron microscope (SEM). This grating period is appropriate for use as a first-order grating with a GaAs distributed feedback laser.


Item Type:Article
Additional Information:©1988 IEE. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the IEE.
Record Number:CaltechAUTHORS:ZARel88
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:ZARel88
Alternative URL:http://ieeexplore.ieee.org/iel1/2220/2700/00082444.pdf
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:737
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:22 Sep 2005
Last Modified:26 Dec 2012 08:41

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