Published July 2012
| public
Book Section - Chapter
Silicon photonic components for integrated optical systems
Abstract
We show that the properties of silicon can be changed profoundly when nanofabricated to below 5nm, resulting in larger bandgap emission and more efficient light generation. Moreover, three-dimensional nanostructures can be fabricated at these nanoscale dimensions by dynamic control over the dry etching process.
Additional Information
© 2012 IEEE. Support from the NSF through the CIAN is gratefully acknowledged.Additional details
- Eprint ID
- 74137
- DOI
- 10.1109/OECC.2012.6276676
- Resolver ID
- CaltechAUTHORS:20170207-171906236
- NSF
- Created
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2017-02-08Created from EPrint's datestamp field
- Updated
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2021-11-11Created from EPrint's last_modified field