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Fabrication methods for a quantum cascade photonic crystal surface emitting laser

Tennant, D. M. and Colombelli, R. and Srinivasan, K. and Troccoli, M. and Painter, O. and Gmachl, C. and Capasso, F. and Sergent, A. M. and Sivco, D. L. and Cho, A. Y. (2003) Fabrication methods for a quantum cascade photonic crystal surface emitting laser. Journal of Vacuum Science and Technology B, 21 (6). pp. 2907-2911. ISSN 1071-1023. http://resolver.caltech.edu/CaltechAUTHORS:TENjvstb03

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Abstract

Conventional quantum cascade (QC) lasers are intrinsically edge-emitting devices with mode confinement achieved via a standard mesa stripe configuration. Surface emission in edge emitting QC lasers has therefore necessitated redirecting the waveguided laser emission using a second order grating. This paper describes the methods used to fabricate a 2D photonic crystal (PC) structure with or without a central defect superimposed on an electrically pumped QC laser structure with the goal of achieving direct surface emission. A successful systematic study of PC hole radius and spacing was performed using e-beam lithography. This PC method offers the promise of a number of interesting applications, including miniaturization and integration of QC lasers.


Item Type:Article
Additional Information:©2003 American Vacuum Society. (Received 26 June 2003; accepted 29 September 2003; published 9 December 2003)
Subject Keywords:quantum cascade lasers; surface emitting lasers; photonic crystals; electron beam lithography
Record Number:CaltechAUTHORS:TENjvstb03
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:TENjvstb03
Alternative URL:http://dx.doi.org/10.1116/1.1627815
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:9144
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:01 Nov 2007
Last Modified:26 Dec 2012 09:45

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