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Solid-phase epitaxial growth of Si mesas from Al metallization

Sankur, H. and McCaldin, J. O. and Devaney, John (1973) Solid-phase epitaxial growth of Si mesas from Al metallization. Applied Physics Letters, 22 (2). pp. 64-66. ISSN 0003-6951. http://resolver.caltech.edu/CaltechAUTHORS:SANapl73

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Abstract

Si epitaxial growth from solution in solid Al onto crystal Si substrates was studied by scanning electron microscopy. Growth in reentrant corners of the substrate was found to be favored over growth onto a flat surface. For this reason, the smaller-diameter oxide cuts used in integrated-circuit fabrication, in which no portion of the exposed substrate Si is far from a reentrant corner, are favored sites for growth. Si growth readily fills in such oxide cuts forming mesa structures potentially useful in device construction. The probable cause for such preferential growth was indicated in pressure experiments which show that regions in the solid Al under relatively less compression are favored locations for growth.


Item Type:Article
Additional Information:© 1973 American Institute of Physics. Received 16 October 1972. Work supported in part by the Office of Naval Research and NASA through the Jet Propulsion Laboratory of the California Institute of Technology.
Record Number:CaltechAUTHORS:SANapl73
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:SANapl73
Alternative URL:http://dx.doi.org/10.1063/1.1654558
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:9699
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:05 Mar 2008
Last Modified:26 Dec 2012 09:51

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