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Wu, S. and Lin, Q. and Yuen, Y. et al. (2000) MEMS flow sensors for nano-fluidic applications. In: International Conference on Micro Electro Mechanical Systems, 13th, MEMS 2000. IEEE , Piscataway, NJ, pp. 745-750. ISBN 0-7803-5273-4. http://resolver.caltech.edu/CaltechAUTHORS:WUSmems00

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