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Tsai, C. J. and Dommann, A. and Nicolet, M. A. et al. (1991) Self-consistent determination of the perpendicular strain profile of implanted Si by analysis of x-ray rocking curves. Journal of Applied Physics, 69 (4). pp. 2076-2079. ISSN 0021-8979. http://resolver.caltech.edu/CaltechAUTHORS:TSAjap91