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Du, Jiangang and Roukes, Michael L. and Masmanidis, Sotiris C. (2009) Dual-side and three-dimensional microelectrode arrays fabricated from ultra-thin silicon substrates. Journal of Micromechanics and Microengineering, 19 (7). 075008. ISSN 0960-1317. http://resolver.caltech.edu/CaltechAUTHORS:20090807-091456747

This list was generated on Sun Jul 23 02:36:28 2017 PDT.