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Henry, M. D. and Walavalkar, S. and Homyk, A. et al. (2009) Alumina etch masks for fabrication of high-aspect-ratio silicon micropillars and nanopillars. Nanotechnology, 20 (25). p. 255305. ISSN 0957-4484. http://resolver.caltech.edu/CaltechAUTHORS:20090831-074104743

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