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Henry, M. David and Welch, Colin and Scherer, Axel (2009) Techniques of cryogenic reactive ion etching in silicon for fabrication of sensors. Journal of Vacuum Science and Technology A, 27 (5). pp. 1211-1216. ISSN 0734-2101.

This list was generated on Mon Aug 21 06:50:27 2017 PDT.