A Caltech Library Service

Browse by Eprint ID

Up a level
Export as [feed] Atom [feed] RSS 1.0 [feed] RSS 2.0
Number of items: 1.

Henry, M. David and Welch, Colin and Scherer, Axel (2009) Techniques of cryogenic reactive ion etching in silicon for fabrication of sensors. Journal of Vacuum Science and Technology A, 27 (5). pp. 1211-1216. ISSN 0734-2101.

This list was generated on Fri Jun 23 17:17:04 2017 PDT.