CaltechAUTHORS
  A Caltech Library Service

Browse by Eprint ID

Up a level
Export as [feed] Atom [feed] RSS 1.0 [feed] RSS 2.0
Number of items: 1.

Henry, M. David and Welch, Colin and Scherer, Axel (2009) Techniques of cryogenic reactive ion etching in silicon for fabrication of sensors. Journal of Vacuum Science and Technology A, 27 (5). pp. 1211-1216. ISSN 0734-2101. http://resolver.caltech.edu/CaltechAUTHORS:20090923-143135056

This list was generated on Wed Mar 29 17:46:27 2017 PDT.