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Karabalin, R. B. and Matheny, M. H. and Feng, X. L. et al. (2009) Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films. Applied Physics Letters, 95 (10). Art. No. 103111. ISSN 0003-6951. http://resolver.caltech.edu/CaltechAUTHORS:20091001-140129826

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