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Jiang, Fan and Stavola, Michael and Rohatgi, A. et al. (2003) Hydrogenation of Si from SiNx(H) films: Characterization of H introduced into the Si. Applied Physics Letters, 83 (5). pp. 931-933. ISSN 0003-6951. http://resolver.caltech.edu/CaltechAUTHORS:JIAapl03

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