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Hwang, Gyeong S. and Giapis, Konstantinos P. (1997) On the origin of the notching effect during etching in uniform high density plasmas. Journal of Vacuum Science and Technology B, 15 (1). pp. 70-87. ISSN 1071-1023. http://resolver.caltech.edu/CaltechAUTHORS:HWAjvstb97c

This list was generated on Fri Mar 24 09:01:26 2017 PDT.