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Lin, Jeffrey Chun-Hui and Yu, Feiqiao and Tai, Yu-Chong (2010) Cracking pressure control of parylene checkvalve using slanted tensile tethers. In: MEMS 2010: 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. Proceedings: IEEE Micro Electro Mechanical Systems. IEEE , pp. 1107-1110. ISBN 978-1-4244-5764-9 . http://resolver.caltech.edu/CaltechAUTHORS:20100713-143812992

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