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Harder, Theodore A. and Yao, Tze-Jung and He, Qing et al. (2002) Residual stress in thin-film parylene-C. In: 15th IEEE International Conference on Micro Electro Mechanical Systems. Proceedings: IEEE Micro Electro Mechanical Systems Workshop. IEEE , Piscataway, NJ, pp. 435-438. ISBN 0-7803-7185-2 http://resolver.caltech.edu/CaltechAUTHORS:20111101-111718089

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