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Sankaran, R. Mohan and Giapis, K. P. (2003) High-pressure micro-discharges in etching and deposition applications. Journal of Physics D: Applied Physics, 36 (23). pp. 2914-2921. ISSN 0022-3727. http://resolver.caltech.edu/CaltechAUTHORS:SANjpdap03

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