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Giapis, Konstantinos P. and Moore, Teresa A. and Minton, Timothy K. (1995) Hyperthermal neutral beam etching. Journal of Vacuum Science and Technology A, 13 (3). pp. 959-965. ISSN 0734-2101. http://resolver.caltech.edu/CaltechAUTHORS:GIAjvsta95

This list was generated on Mon Apr 24 14:23:19 2017 PDT.