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Giapis, Konstantinos P. et al. (1991) Use of light scattering in characterizing reactively ion etched profiles. Journal of Vacuum Science and Technology A, 9 (3). pp. 664-668. ISSN 0734-2101 http://resolver.caltech.edu/CaltechAUTHORS:GIAjvsta91

This list was generated on Fri May 24 11:36:10 2013 PDT.