Number of items: 153.
Romano, V.
et al.
(2011)
Irradiation of amorphous Ta_(42)Si_(13)N_(45) film with a femtosecond laser pulse.
Applied Physics A: Materials Science and Processing, 104
(1).
pp. 357-364.
ISSN 0947-8396
http://resolver.caltech.edu/CaltechAUTHORS:20110706-112823253
Eisen, F. H. and Nicolet, M.-A.
(2003)
Preferred Position of the Detector for MeV Backscattering Spectrometry.
In:
Application of accelerators in research and industry.
AIP Conference Proceedings
(680).
American Institute of Physics
, Melville, NY, pp. 411-413.
ISBN 0-7354-0149-7
http://resolver.caltech.edu/CaltechAUTHORS:20111011-081811288
Gasser, S. M. and Kolawa, E. and Nicolet, M.-A.
(1999)
Thermal reaction of Pt film with 110 GaN epilayer.
Journal of Vacuum Science and Technology A, 17
(5).
pp. 2642-2646.
ISSN 0734-2101
http://resolver.caltech.edu/CaltechAUTHORS:GASjvsta99
Gasser, S. M.
et al.
(1999)
Instability of Amorphous Ru-Si-O Thin Films under Thermal Oxidation.
Journal of the Electrochemical Society, 146
(4).
pp. 1546-1548.
ISSN 0013-4651
http://resolver.caltech.edu/CaltechAUTHORS:GASjes99
Kacsich, T.
et al.
(1998)
Films of Ni–7 at% V, Pd, Pt and Ta–Si–N as diffusion barriers for copper on Bi2Te3.
Journal of Physics D: Applied Physics, 31
(19).
pp. 2406-2411.
ISSN 0022-3727
http://resolver.caltech.edu/CaltechAUTHORS:KACjpd98
Grétillat, M.-A.
et al.
(1998)
Surface-micromachined Ta–Si–N beams for use in micromechanics.
Journal of Micromechanics and Microengineering, 8
(2).
pp. 88-90.
ISSN 0960-1317
http://resolver.caltech.edu/CaltechAUTHORS:GREjmm98
Grétillat, M.-A.
et al.
(1998)
Surface-micromachined Ta-Si-N beams for use in micromechanics.
Journal of Micromechanics and Microengineering, 8
(2).
pp. 88-90.
ISSN 0960-1317
http://resolver.caltech.edu/CaltechAUTHORS:20111222-090724822
Im, S.
et al.
(1997)
SiGeC alloy layer formation by high-dose C + implantations into pseudomorphic metastable Ge0.08Si0.92 on Si(100).
Journal of Applied Physics, 81
(4).
pp. 1700-1703.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:IMSjap97
Sun, X.
et al.
(1996)
Oxidation and crystallization of an amorphous Zr60Al15Ni25 alloy.
Journal of Materials Research, 11
(11).
pp. 2738-2743.
ISSN 0884-2914
http://resolver.caltech.edu/CaltechAUTHORS:SUNjmr96
Reid, J. S.
et al.
(1996)
Amorphous (Mo, Ta, or W)–Si–N diffusion barriers for Al metallizations.
Journal of Applied Physics, 79
(2).
pp. 1109-1117.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:REIjap96
Dauksher, W. J.
et al.
(1995)
Method for fabricating a low stress x-ray mask using annealable amorphous refractory compounds.
Journal of Vacuum Science and Technology B, 13
(6).
pp. 3103-3108.
ISSN 1071-1023
http://resolver.caltech.edu/CaltechAUTHORS:20120216-095821404
McLane, G. F.
et al.
(1994)
Reactive ion etching of Ta–Si–N diffusion barriers in CF_(4)+O_(2).
Journal of Vacuum Science and Technology B, 12
(4).
pp. 2352-2355.
ISSN 1071-1023
http://resolver.caltech.edu/CaltechAUTHORS:20120306-151931971
Lie, D. Y. C.
et al.
(1993)
Damage and strain in epitaxial GexSi1–x films irradiated with Si.
Journal of Applied Physics, 74
(10).
pp. 6039-6045.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:LIEjap93
Liu, W. S.
et al.
(1992)
Instability of a GexSi1−xO2 film on a GexSi1−x layer.
Journal of Applied Physics, 72
(9).
pp. 4444-4446.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:LIUjap92c
Workman, T. W. and Nicolet, M-A.
(1992)
D(d,p)T fusion induced by heavy-ion irradiation of TiD1.7.
Physical Review B, 46
(13).
pp. 8589-8592.
ISSN 0163-1829
http://resolver.caltech.edu/CaltechAUTHORS:WORprb92
Bai, G. and Nicolet, M.-A.
(1992)
Generation and recovery of strain in (28)Si-implanted pseudomorphic GeSi films on Si(100).
Journal of Applied Physics, 71
(9).
pp. 4227-4229.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:BAIjap92b
Liu, W. S.
et al.
(1992)
Wet oxidation of GeSi at (700)C.
Journal of Applied Physics, 71
(8).
pp. 4015-4018.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:LIUjap92b
Liu, W. S.
et al.
(1992)
Importance of sample preheating in oxidation of GexSi1−x.
Journal of Applied Physics, 71
(7).
pp. 3626-3627.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:LIUjap92a
Bai, G. and Nicolet, M.-A.
(1992)
Damage production and annealing in 28Si-implanted CoSi2/Sim(111) heterostructures.
Journal of Applied Physics1, 71
(2).
pp. 670-675.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:BAIjap92a
Bai, G. and Nicolet, M.-A.
(1991)
Defect production in Si(100) by 19F, 28Si, 40Ar, and 131Xe implantation at room temperature.
Journal of Applied Physics, 70
(7).
pp. 3551-3555.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:BAIjap91c
Chen, J. S.
et al.
(1991)
Epitaxial growth of GaAs by solid-phase transport.
Applied Physics Letters, 59
(13).
pp. 1597-1599.
ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:CHEapl91
Pokela, P. J.
et al.
(1991)
Thermal oxidation of amorphous ternary Ta36Si14N50 thin films.
Journal of Applied Physics, 70
(5).
pp. 2828-2832.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:POKjap91
Kolawa, E.
et al.
(1991)
Tantalum-based diffusion barriers in Si/Cu VLSI metallizations.
Journal of Applied Physics, 70
(3).
pp. 1369-1373.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:KOLjap91
Bai, G. and Nicolet, M.-A.
(1991)
Defects production and annealing in self-implanted Si.
Journal of Applied Physics, 70
(2).
pp. 649-655.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:BAIjap91b
Bai, G. and Nicolet, M.-A. and Vreeland, T., Jr.
(1991)
Elastic and thermal properties of mesotaxial CoSi2 layers on Si.
Journal of Applied Physics, 69
(9).
pp. 6451-6455.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:BAIjap91a
Tsai, C. J.
et al.
(1991)
Self-consistent determination of the perpendicular strain profile of implanted Si by analysis of x-ray rocking curves.
Journal of Applied Physics, 69
(4).
pp. 2076-2079.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:TSAjap91
Mahan, John E.
et al.
(1991)
Reflection high-energy electron diffraction patterns of CrSi_2 films on (111) silicon.
Journal of Vacuum Science and Technology B, 9
(1).
pp. 64-68.
ISSN 1071-1023
http://resolver.caltech.edu/CaltechAUTHORS:20120509-133504606
Vu, Quat T.
et al.
(1990)
Thermal oxidation of reactively sputtered amorphous W_(80)N_(20) films.
Journal of Applied Physics, 68
(12).
pp. 6420-6423.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:20120509-153900631
Bai, G.
et al.
(1990)
Radiation damage in ReSi2 by a MeV 4He beam.
Applied Physics Letters, 57
(16).
pp. 1657-1659.
ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:BAIapl90
Bai, G.
et al.
(1990)
Channeling of MeV ions in polyatomic epitaxial films: ReSi2 on Si(100).
Physical Review B, 41
(13).
pp. 8603-8607.
ISSN 0163-1829
http://resolver.caltech.edu/CaltechAUTHORS:BAIprb90
Kolawa, E.
et al.
(1990)
Amorphous Ta–Si–N thin‐film alloys as diffusion barrier in Al/Si metallizations.
Journal of Vacuum Science and Technology A, 8
(3).
pp. 3006-3010.
ISSN 0734-2101
http://resolver.caltech.edu/CaltechAUTHORS:20120508-142551386
Bai, Gang
et al.
(1989)
Strain in epitaxial CoSi2 films on Si (111) and inference for pseudomorphic growth.
Applied Physics Letters, 55
(18).
pp. 1874-1876.
ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:BAIapl89
Ma, E. and Nicolet, M-A. and Nathan, M.
(1989)
NiAl3 formation in Al/Ni thin-film bilayers with and without contamination.
Journal of Applied Physics, 65
(7).
pp. 2703-2710.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:MAEjap89
Thuillard, M.
et al.
(1989)
Thermal reaction of Al/Ti bilayers with contaminated interface.
Journal of Applied Physics, 65
(6).
pp. 2553-2556.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:20120530-151638572
Ma, E.
et al.
(1989)
Ion mixing of metal/Al bilayers near 77 K.
Applied Physics Letters, 54
(5).
pp. 413-415.
ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:MAEapl89
Tandon, J. L.
et al.
(1989)
Sequential nature of damage annealing and activation in implanted GaAs.
Applied Physics Letters, 54
(5).
pp. 448-450.
ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:TANapl89
Kolawa, E.
et al.
(1988)
Indium oxide diffusion barriers for Al/Si metallizations.
Applied Physics Letters, 53
(26).
pp. 2644-2646.
ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:KOLapl88
Ma, W.
et al.
(1988)
Simultaneous planar growth of amorphous and crystalline Ni silicides.
Applied Physics Letters, 53
(21).
pp. 2033-2035.
ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:MAEapl88
So, F. C. T.
et al.
(1988)
WxN1–x alloys as diffusion barriers between Al and Si.
Journal of Applied Physics, 64
(5).
pp. 2787-2789.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:SOFjap88
Zhao, X.-A. and So, F. C. T. and Nicolet, M-A.
(1988)
TiAl3 formation by furnace annealing of Ti/Al bilayers and the effect of impurities.
Journal of Applied Physics, 63
(8).
pp. 2600-2607.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:ZHAjap88
Ma, E.
et al.
(1988)
Ion mixing and thermochemical properties of tracers in Ag.
Journal of Applied Physics, 63
(7).
pp. 2449-2451.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:MAEjap88
Kim, S.-J.
et al.
(1988)
Low-temperature ion-beam mixing in metals.
Physical Review B, 37
(1).
pp. 38-49.
ISSN 0163-1829
http://resolver.caltech.edu/CaltechAUTHORS:KIMprb88
Lim, B. S.
et al.
(1988)
Silicon resistor to measure temperature during rapid thermal annealing.
Review of Scientific Instruments, 59
(1).
pp. 182-183.
ISSN 0034-6748
http://resolver.caltech.edu/CaltechAUTHORS:LIMrsi88
So, F. C. T.
et al.
(1987)
Summary Abstract: Reactively sputtered RuO2 and Mo–O diffusion barriers.
Journal of Vacuum Science and Technology B, 5
(6).
pp. 1748-1749.
ISSN 1071-1023
http://resolver.caltech.edu/CaltechAUTHORS:SOFjvstb87
Zhao, X.-A. and Yang, H.-Y. and Nicolet, M-A.
(1987)
Kinetics of NiAl3 growth induced by steady-state thermal annealing at the Ni-<Al> interface.
Journal of Applied Physics, 62
(5).
pp. 1821-1825.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:ZHAjap87
Lim, B. S.
et al.
(1987)
Kinetics and moving species during Co2Si formation by rapid thermal annealing.
Journal of Applied Physics, 61
(11).
pp. 5027-5030.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:LIMjap87
Workman, T. W.
et al.
(1987)
Effect of thermodynamics on ion mixing.
Applied Physics Letters, 50
(21).
pp. 1485-1487.
ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:WORapl87
Cheng, Y.-T. and Nicolet, M.-A. and Johnson, W. L.
(1987)
From cascade to spike — a fractal-geometry approach.
Physical Review Letters, 58
(20).
pp. 2083-2086.
ISSN 0031-9007
http://resolver.caltech.edu/CaltechAUTHORS:CHEprl87
Kao, Y. C.
et al.
(1987)
Study of CoSi2/Si strained layers grown by molecular beam epitaxy.
Journal of Vacuum Science and Technology B, 5
(3).
pp. 745-748.
ISSN 1071-1023
http://resolver.caltech.edu/CaltechAUTHORS:KAOjvstb87
Kolawa, E.
et al.
(1987)
Reactively sputtered RuO2 diffusion barriers.
Applied Physics Letters, 50
(13).
pp. 854-855.
ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:KOLapl87
Banwell, T.
et al.
(1987)
Chemical effects in ion mixing of a ternary system (metal-SiO_2).
Applied Physics Letters, 50
(10).
pp. 571-573.
ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:20120622-075340401
Zhao, X.-A. and Kolawa, E. and Nicolet, M-A.
(1986)
Reaction of thin metal films with crystalline and amorphous Al2O3.
Journal of Vacuum Science and Technology A, 4
(6).
pp. 3139-3141.
ISSN 0734-2101
http://resolver.caltech.edu/CaltechAUTHORS:ZHAjvsta86
So, F. C. T.
et al.
(1986)
Thermal stability and nitrogen redistribution in the <Si>/Ti/W-N/ AI metallization scheme.
Journal of Vacuum Science and Technology A, 4
(6).
pp. 3078-3081.
ISSN 0734-2101
http://resolver.caltech.edu/CaltechAUTHORS:20120627-125934625
So, F. C. T.
et al.
(1986)
Thermal stability and nitrogen redistribution in the〈Si〉/Ti/W–N/Al metallization scheme.
Journal of Vacuum Science and Technology A, 4
(6).
pp. 3078-3081.
ISSN 0734-2101
http://resolver.caltech.edu/CaltechAUTHORS:20120626-155811980
Cheng, Y.-T.
et al.
(1986)
Correlation between the cohesive energy and the onset of radiation-enhanced diffusion in ion mixing.
Journal of Applied Physics, 60
(7).
pp. 2615-2617.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:CHEjap86
Kattelus, H. P.
et al.
(1986)
Bias-induced stress transitions in sputtered TiN films.
Journal of Vacuum Science and Technology A, 4
(4).
pp. 1850-1854.
ISSN 0734-2101
http://resolver.caltech.edu/CaltechAUTHORS:KATjvsta86
Banwell, Thomas
et al.
(1986)
Effect of dose rate on ion beam mixing in Nb-Si.
Applied Physics Letters, 48
(22).
pp. 1519-1521.
ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:20120626-145123709
Banwell, T. C. and Zhao, X.-A. and Nicolet, M.-A.
(1986)
Effects of ion irradiation on conductivity of CrSi_2 thin films.
Journal of Applied Physics, 59
(9).
pp. 3077-3080.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:20120626-152109958
So, F. C. T. and Lien, C.-D. and Nicolet, M. -A.
(1985)
Formation and electrical properties of Hf Si_2 grown thermally from evaporated Hf and Si films.
Journal of Vacuum Science and Technology A, 3
(6).
pp. 2284-2288.
ISSN 0734-2101
http://resolver.caltech.edu/CaltechAUTHORS:20120628-154831998
Kattelus, H. P.
et al.
(1985)
Sputtered W–N diffusion barriers.
Journal of Vacuum Science and Technology A, 3
(6).
pp. 2246-2254.
ISSN 0734-2101
http://resolver.caltech.edu/CaltechAUTHORS:KATjvsta85
Cheng, Y.-T. and Johnson, W. L. and Nicolet, M-A.
(1985)
Dominant moving species in the formation of amorphous NiZr by solid-state reaction.
Applied Physics Letters, 47
(6).
pp. 800-802.
ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:CHEapl85a
Affolter, K. and Zhao, X.-A. and Nicolet, M.-A.
(1985)
Transition-metal silicides formed by ion mixing and by thermal annealing: Which species moves?
Journal of Applied Physics, 58
(8).
pp. 3087-3083.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:AFFjap85
Van Rossum, M.
et al.
(1985)
Correlation between cohesive energy and mixing rate in ion mixing of metallic bilayers.
Applied Physics Letters, 46
(6).
pp. 610-612.
ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:ROSapl85
Hamdi, A. H.
et al.
(1985)
Analyses of metalorganic chemical-vapor-deposition-grown AlxGa1−xAs/GaAs strained superlattice structures by backscattering spectrometry and x-ray rocking curves.
Journal of Applied Physics, 57
(4).
pp. 1400-1402.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:HAMjap85
Hamdi, A. H.
et al.
(1985)
Combined use of ion backscattering and x-ray rocking curves in the analyses of superlattices.
Physical Review B, 31
(4).
pp. 2343-2347.
ISSN 0163-1829
http://resolver.caltech.edu/CaltechAUTHORS:HAMprb85
Speriosu, V. S.
et al.
(1985)
Interfacial strain in AlxGa1–xAs layers on GaAs.
Journal of Applied Physics, 57
(4).
pp. 1377-1379.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:SPEjap85
Pan, C. K.
et al.
(1985)
Structural study of GaSb/AlSb strained-layer superlattice.
Physical Review B, 31
(3).
pp. 1270-1277.
ISSN 0163-1829
http://resolver.caltech.edu/CaltechAUTHORS:PANprb85
Kim, Sung-Joon
et al.
(1985)
Low-temperature ion beam mixing of Pt and Si markers in Ge.
Applied Physics Letters, 46
(2).
pp. 154-156.
ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:KIMapl85
Ho, K. T. and Lien, C. D. and Nicolet, M-A.
(1985)
Palladium silicide formation under the influence of nitrogen and oxygen impurities.
Journal of Applied Physics, 57
(2).
pp. 232-236.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:HOKjap85a
Zur, A. and McGill, T. C. and Nicolet, M.-A.
(1985)
Transition-metal silicides lattice-matched to silicon.
Journal of Applied Physics, 57
(2).
pp. 600-603.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:ZURjap85
Ho, K. T.
et al.
(1985)
An inert marker study for palladium silicide formation: Si moves in polycrystalline Pd2Si.
Journal of Applied Physics, 57
(2).
pp. 227-231.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:HOKjap85b
Lien, C.-D. and Nicolet, M.-A. and Pai, C. S.
(1985)
A structure marker study for Pd_2Si formation: Pd moves in epitaxial Pd_2Si.
Journal of Applied Physics, 57
(2).
pp. 224-226.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:20120628-081537763
Zhu, M. F.
et al.
(1984)
Reaction of amorphous Ni-W and Ni-N-W films with substrate silicon.
Journal of Applied Physics, 56
(10).
pp. 2740-2745.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:ZHUjap84
Lien, C. D. and Nicolet, M-A.
(1984)
Impurity effects in transition metal silicides.
Journal of Vacuum Science and Technology B, 2
(4).
pp. 738-747.
ISSN 1071-1023
http://resolver.caltech.edu/CaltechAUTHORS:LIEjvstb84
Van Rossum, M. and Nicolet, M-A. and Wilts, C. H.
(1984)
Magnetic properties of amorphous thin films produced by ion mixing.
Journal of Applied Physics, 56
(4).
pp. 1032-1035.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:ROSjap84
Ho, K. T. and Suni, I. and Nicolet, M-A.
(1984)
Substrate orientation dependence of enhanced epitaxial regrowth of silicon.
Journal of Applied Physics, 56
(4).
pp. 1207-1212.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:HOKjap84
Speriosu, V. S.
et al.
(1984)
Depth profiles of perpendicular and parallel strain in a GaAsxP1−x/GaP superlattice.
Applied Physics Letters, 45
(3).
pp. 223-225.
ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:SPEapl84
Suni, I.
et al.
(1984)
Influence of F and Cl on the recrystallization of ion-implanted amorphous Si.
Journal of Applied Physics, 56
(2).
pp. 273-278.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:SUNjap84
Cheng, Y-T.
et al.
(1984)
Influence of chemical driving forces in ion mixing of metallic bilayers.
Applied Physics Letters, 45
(2).
pp. 185-187.
ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:CHEapl84
Lien, C.-D. and Nicolet, M-A.
(1984)
Mathematical model for a radioactive marker in silicide formation.
Journal of Applied Physics, 55
(12).
pp. 4187-4193.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:20120702-094830929
Van Rossum, M. and Nicolet, M-A. and Johnson, W. L.
(1984)
Amorphization of Hf-Ni films by solid-state reaction.
Physical Review B, 29
(10).
pp. 5498-5504.
ISSN 0163-1829
http://resolver.caltech.edu/CaltechAUTHORS:ROSprb84
Shreter, U. and So, Frank C. T. and Nicolet, M-A.
(1984)
Chromium silicide formation by ion mixing.
Journal of Applied Physics, 55
(10).
pp. 3500-3504.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:20120702-115714409
Kung, K. T-Y. and Suni, I. and Nicolet, M-A.
(1984)
Electrical characteristics of amorphous molybdenum-nickel contacts to silicon.
Journal of Applied Physics, 55
(10).
pp. 3882-3885.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:KUNjap84
Bartur, M. and Nicolet, M-A.
(1984)
Self-confined metallic interconnects for very large scale integration.
Applied Physics Letters, 44
(2).
pp. 263-264.
ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:BARapl84a
Barcz, A. J. and Paine, B. M. and Nicolet, M-A.
(1984)
Ion mixing of markers in SiO2 and Si.
Applied Physics Letters, 44
(1).
pp. 45-47.
ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:BARapl84c
Prabhakar, A. and McGill, T. C. and Nicolet, M.-A.
(1983)
Platinum diffusion into silicon from PtSi.
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Hung, L. S.
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Kinetics of TiSi2 formation by thin Ti films on Si.
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Bartur, M. and Nicolet, M-A.
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Marker experiments for diffusion in the silicide during oxidation of PdSi, Pd2Si, CoSi2, and NiSi2 films on <Si>.
Journal of Applied Physics, 54
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Shreter, U. and Fernandez, R. and Nicolet, M-A.
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Temperature-dependent ion mixing and diffusion during sputtering of thin films of CrSi_2 on silicon.
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Liu, B. X.
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Ion mixing to produce amorphous Mo-Ru superconducting films.
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Liu, Bai-Xin
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Structural difference rule for amorphous alloy formation by ion mixing.
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Matteson, S. and Nicolet, M-A.
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Suni, I.
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Compensating impurity effect on epitaxial regrowth rate of amorphized Si.
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Mäenpää, M.
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The heteroepitaxy of Ge on Si: A comparison of chemical vapor and vacuum deposited layers.
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Wieluński, L. S.
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Bartur, M. and Nicolet, M-A.
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Thermal oxidation of nickel disilicide.
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Bartur, M. and Nicolet, M-A.
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Electrical characteristics of Al contact to NiSi using thin W layer as a barrier.
Applied Physics Letters, 39
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Nicolet, M-A. and Bartur, M.
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Diffusion barriers in layered contact structures.
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Grunthaner, P. J.
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Oxygen impurity effects at metal/silicide interfaces: Formation of silicon oxide and suboxides in the Ni/Si system.
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Grimaldi, M. G.
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Epitaxial regrowth of thin amorphous GaAs layers.
Applied Physics Letters, 39
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Grimaldi, M. G.
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Ion implantation and low-temperature epitaxial regrowth of GaAs.
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Tsaur, B. Y.
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Sequence of phase formation in planar metal-Si reaction couples.
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Cheung, N. W.
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Thermal stability of titanium nitride for shallow junction solar cell contacts.
Journal of Applied Physics, 52
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Grimaldi, M. G.
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Epitaxial growth of amorphous Ge films deposited on single-crystal Ge.
Journal of Applied Physics, 52
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Wieluński, L.
et al.
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Alteration of Ni silicide formation by N implantation.
Applied Physics Letters, 38
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pp. 106-108.
ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:20120719-133310810
Tsaur, B. Y. and Nicolet, M-A.
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Reversible phase transformation in the Pd2Si-PdSi thin-film system.
Applied Physics Letters, 37
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Masuyama, A.
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Steady-state thermally annealed GaAs with room-temperature-implanted Si.
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Campisano, S. U.
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Laser pulse annealing of ion-implanted GaAs.
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Tandon, J. L.
et al.
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Pulsed electron beam induced recrystallization and damage in GaAs.
Applied Physics Letters, 35
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pp. 867-870.
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Tsaur, B. Y.
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Depth dependence of atomic mixing by ion beams.
Applied Physics Letters, 35
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pp. 825-828.
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Lau, S. S.
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Solar furnace annealing of amorphous Si layers.
Applied Physics Letters, 35
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ISSN 0003-6951
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Roulet, M. E.
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Laser annealing of silicon on sapphire.
Journal of Applied Physics, 50
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Tandon, J. L.
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Pulsed-laser annealing of implanted layers in GaAs.
Applied Physics Letters, 34
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Matteson, S. and Tonn, D. G. and Nicolet, M-A.
(1979)
Diagnostic test for ion implantation dosimetry.
Journal of Vacuum Science and Technology, 16
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pp. 882-883.
ISSN 0022-5355
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Tandon, J. L. and Nicolet, M-A. and Eisen, F. H.
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Silicon implantation in GaAs.
Applied Physics Letters, 34
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von Allmen, M.
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Influence of the absorption coefficient in Nd laser annealing of amorphized semiconductor layers.
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Finstad, T. G. and Nicolet, M-A.
(1979)
Silicide formation with bilayers of Pd-Pt, Pd-Ni, and Pt-Ni.
Journal of Applied Physics, 50
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pp. 303-307.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:FINjap79
Lau, S. S.
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Heteroepitaxy of deposited amorphous layer by pulsed electron-beam irradiation.
Applied Physics Letters, 33
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pp. 235-237.
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Lau, S. S.
et al.
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Epitaxial growth of deposited amorphous layer by laser annealing.
Applied Physics Letters, 33
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pp. 130-131.
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Mayer, James W.
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Use of ion beams in space.
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Pretorius, R.
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Growth mechanism for solid-phase epitaxy of Si in the Si <100>/Pd2Si/Si(amorphous) system studied by a radioactive tracer technique.
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Harris, J. M.
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Solid-phase crystallization of Si films in contact with Al layers.
Journal of Applied Physics, 48
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Wittmer, W. and Finstad, T. and Nicolet, M-A.
(1977)
Investigation of the Au-Ge-Ni and Au-Ge-Pt system used
for alloyed contacts to GaAs.
Journal of Vacuum Science and Technology, 14
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Pretorius, R.
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Radioactive silicon as a marker in thin-film silicide formation.
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Lau, S. S.
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Heterostructure by solid‐phase epitaxy in the Si〈111〉/Pd/Si (amorphous) system.
Journal of Applied Physics, 48
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http://resolver.caltech.edu/CaltechAUTHORS:20120808-085747179
Olowolafe, J. O. and Nicolet, M.-A. and Mayer, J. W.
(1976)
Formation kinetics of CrSi2 films on Si substrates with and without interposed Pd2Si layer.
Journal of Applied Physics, 47
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Pretorius, R.
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Dissociation mechanism for solid-phase epitaxy of silicon in the Si <100>/Pd2Si/Si (amorphous) system.
Applied Physics Letters, 29
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Nakamura, K.
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Interaction of metal layers with polycrystalline Si.
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Nakamura, K.
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Ti and V layers retard interaction between Al films and polycrystalline Si.
Applied Physics Letters, 28
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Lau, S. S.
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Antimony doping of Si layers grown by solid-phase epitaxy.
Applied Physics Letters, 28
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Nakamura, K.
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Interaction of Al layers with polycrystalline Si.
Journal of Applied Physics, 46
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pp. 4678-4684.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:NAKjap75
Feng, J. S.-Y. and Pashley, R. D. and Nicolet, M.-A.
(1975)
Magnetoelectric properties of magnetite thin films.
Journal of Physics C: Solid State Physics, 8
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Malm, H. L.
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Gamma–ray spectroscopy with single–carrier collection in high–resistivity semiconductors.
Applied Physics Letters, 26
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Harris, J. M. and Nicolet, M-A.
(1975)
Energy straggling of 4He ions below 2.0 MeV in Al, Ni, and Au.
Physical Review B, 11
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pp. 1013-1019.
ISSN 0163-1829
http://resolver.caltech.edu/CaltechAUTHORS:HARprb75
Mayer, J. W. and Nicolet, M-A. and Chu, W. K.
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Backscattering spectrometry.
Journal of Vacuum Science and Technology, 12
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p. 356.
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http://resolver.caltech.edu/CaltechAUTHORS:20120803-104952611
Harris, J. M. and Nicolet, M-A.
(1975)
Energy straggling of 4He ions below 2.0 MeV in Al, Ni, Pt, and Au.
Journal of Vacuum Science and Technology, 12
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http://resolver.caltech.edu/CaltechAUTHORS:HARjvst75b
Harris, J. M.
et al.
(1975)
Studies on the Al2O3–Ti–Mo–Au metallization system.
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http://resolver.caltech.edu/CaltechAUTHORS:HARjvst75a
Feng, J. S.-Y. and Chu, W. K. and Nicolet, M-A.
(1974)
Stopping-cross-section additivity for 1-2-MeV 4He+ in solid oxides.
Physical Review B, 10
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Chu, W. K.
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Identification of the dominant diffusing species in silicide formation.
Applied Physics Letters, 25
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http://resolver.caltech.edu/CaltechAUTHORS:CHUapl74
Kräutle, H. and Nicolet, M-A. and Mayer, J. W.
(1974)
Kinetics of silicide formation by thin films of V on Si and SiO_2 substrates.
Journal of Applied Physics, 45
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http://resolver.caltech.edu/CaltechAUTHORS:20120809-110703213
Ottaviani, G.
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Formation of Injecting and Blocking Contacts on High-Resistivity Germanium.
Applied Physics Letters, 20
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ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:OTTapl72
Bajorek, C. H. and Nicolet, M.-A. and Wilts, C. H.
(1971)
Preferential Oxidation of Fe in Permalloy Films.
Applied Physics Letters, 19
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pp. 82-84.
ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:BAJapl71
Hiraki, A. and Nicolet, M-A. and Mayer, J. W.
(1971)
Low-temperature migration of silicon in thin layers of gold platinum.
Applied Physics Letters, 18
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pp. 178-181.
ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:HIRapl71
Bilger, H. R. and Nicolet, M.-A.
(1970)
A Flexible Simple Thermostat for Small Objects and the Range of 100 to 400 K.
Review of Scientific Instruments, 41
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pp. 346-347.
ISSN 0034-6748
http://resolver.caltech.edu/CaltechAUTHORS:20120730-121345445
Lee, D. H. and Nicolet, M. -A.
(1969)
Thermal noise in double injection.
Physical Review, 184
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pp. 806-808.
ISSN 0031-899X
http://resolver.caltech.edu/CaltechAUTHORS:LEEpr69
Rodriguez, V. and Nicolet, M-A.
(1969)
Drift velocity of electrons in silicon at high electric fields from 4.2° to 300°K.
Journal of Applied Physics, 40
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pp. 496-498.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:RODjap69
Bilger, H. R.
et al.
(1968)
Noise and Equivalent Circuit of Double Injection.
Journal of Applied Physics, 39
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pp. 5913-5918.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:20120827-112350834
Nicolet, M.-A. and Bilger, H. R. and McCarter, E. R.
(1966)
Noise suppression in a double-injection silicon diode.
Applied Physics Letters, 9
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pp. 434-436.
ISSN 0003-6951
http://resolver.caltech.edu/CaltechAUTHORS:NICapl66
Nicolet, M-A.
(1966)
Unipolar space-charge-limited current in solids with nonuniform spacial distribution of shallow traps.
Journal of Applied Physics, 37
(11).
pp. 4224-4235.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:NICjap66
Baron, R. and Nicolet, M-A. and Rodriguez, V.
(1966)
Differential Step Response of Unipolar Space-Charge-Limited Current in Solids.
Journal of Applied Physics, 37
(11).
pp. 4156-4158.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:20120827-110918315
Denda, S. and Nicolet, M-A.
(1966)
Pure Space-Charge-Limited Electron Current in Silicon.
Journal of Applied Physics, 37
(6).
pp. 2412-2424.
ISSN 0021-8979
http://resolver.caltech.edu/CaltechAUTHORS:20120828-070404189
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