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Visible-light silicon nitride waveguide devices and implantable neurophotonic probes on thinned 200 mm silicon wafers

Sacher, Wesley D. and Luo, Xianshu and Yang, Yisu and Chen, Fu-Der and Lordello, Thomas and Mak, Jason C. C. and Liu, Xinyu and Hu, Ting and Xue, Tianyuan and Lo, Patrick Guo-Qiang and Roukes, Michael L. and Poon, Joyce K. S. (2019) Visible-light silicon nitride waveguide devices and implantable neurophotonic probes on thinned 200 mm silicon wafers. Optics Express, 27 (26). pp. 37400-37418. ISSN 1094-4087. https://resolver.caltech.edu/CaltechAUTHORS:20200124-102453280

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Abstract

We present passive, visible light silicon nitride waveguides fabricated on ≈ 100 µm thick 200 mm silicon wafers using deep ultraviolet lithography. The best-case propagation losses of single-mode waveguides were ≤ 2.8 dB/cm and ≤ 1.9 dB/cm over continuous wavelength ranges of 466-550 nm and 552-648 nm, respectively. In-plane waveguide crossings and multimode interference power splitters are also demonstrated. Using this platform, we realize a proof-of-concept implantable neurophotonic probe for optogenetic stimulation of rodent brains. The probe has grating coupler emitters defined on a 4 mm long, 92 µm thick shank and operates over a wide wavelength range of 430-645 nm covering the excitation spectra of multiple opsins and fluorophores used for brain stimulation and imaging.


Item Type:Article
Related URLs:
URLURL TypeDescription
https://doi.org/10.1364/oe.27.037400DOIArticle
ORCID:
AuthorORCID
Sacher, Wesley D.0000-0003-3306-4556
Luo, Xianshu0000-0002-5531-5689
Mak, Jason C. C.0000-0003-2350-5813
Roukes, Michael L.0000-0002-2916-6026
Additional Information:© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement. Received 26 Aug 2019; revised 6 Nov 2019; accepted 11 Nov 2019; published 11 Dec 2019. We thank Dr. Huang Ying, Dr. Laurent Moreaux, Dr. Eran Segev, and Dr. Trevor Fowler for assistance and helpful discussions. Funding: Canadian Institutes of Health Research (302353-381345); Natural Sciences and Engineering Research Council of Canada (CHRP 508406-17); National Institutes of Health (NS090596, NS099726); Kavli Nanoscience Institute.
Group:Kavli Nanoscience Institute
Funders:
Funding AgencyGrant Number
Canadian Institutes of Health Research (CIHR)302353-381345
Natural Sciences and Engineering Research Council of Canada (NSERC)CHRP 508406-17
NIHNS090596
NIHNS099726
Kavli Nanoscience InstituteUNSPECIFIED
Issue or Number:26
Record Number:CaltechAUTHORS:20200124-102453280
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20200124-102453280
Official Citation:Wesley D. Sacher, Xianshu Luo, Yisu Yang, Fu-Der Chen, Thomas Lordello, Jason C. C. Mak, Xinyu Liu, Ting Hu, Tianyuan Xue, Patrick Guo-Qiang Lo, Michael L. Roukes, and Joyce K. S. Poon, "Visible-light silicon nitride waveguide devices and implantable neurophotonic probes on thinned 200 mm silicon wafers," Opt. Express 27, 37400-37418 (2019)
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:100897
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:24 Jan 2020 20:02
Last Modified:24 Jan 2020 20:02

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