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Scalable fabrication of nano-architected materials using 3D interference lithography with metasurfaces at visible wavelengths (Conference Presentation)

Pearson, Phillippe and Kamali, Seyedeh Mahsa and Afshinmanesh, Farzaneh and Navrazhnykh, Luizetta and Ng, Ryan and Faraon, Andrei and Greer, Julia R. (2020) Scalable fabrication of nano-architected materials using 3D interference lithography with metasurfaces at visible wavelengths (Conference Presentation). In: Photonic and Phononic Properties of Engineered Nanostructures X. Proceedings of SPIE. No.11289. Society of Photo-optical Instrumentation Engineers (SPIE) , Bellingham, WA, Art. No. 112890I. ISBN 9781510633414. https://resolver.caltech.edu/CaltechAUTHORS:20200311-151707535

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Abstract

Nano-architected materials have the potential to be adopted in several areas including photonic devices and structural materials. We present a 3D interference lithography technique with dielectric metasurfaces at visible wavelengths that allows patterning of thick epoxide films over areas on the order of 10 cm^2 with 100 nm resolution. By leveraging the ability of the metasurface to control the amplitude and phase of a wavefront, complex near-field 3D interference patterns can be designed. Pyrolysis of 3D patterned SU-8 produces a carbon-based material with sub-100 nm features and enhanced mechanical properties.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1117/12.2555112DOIArticle
ORCID:
AuthorORCID
Kamali, Seyedeh Mahsa0000-0002-6968-811X
Ng, Ryan0000-0002-0527-9130
Faraon, Andrei0000-0002-8141-391X
Greer, Julia R.0000-0002-9675-1508
Additional Information:© 2020 Society of Photo-Optical Instrumentation Engineers (SPIE).
Series Name:Proceedings of SPIE
Issue or Number:11289
Record Number:CaltechAUTHORS:20200311-151707535
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20200311-151707535
Official Citation:Phillippe Pearson, Seyedeh Mahsa Kamali, Farzaneh Afshinmanesh, Luizetta Navrazhnykh, Ryan Ng, Andrei Faraon, and Julia R. Greer "Scalable fabrication of nano-architected materials using 3D interference lithography with metasurfaces at visible wavelengths (Conference Presentation)", Proc. SPIE 11289, Photonic and Phononic Properties of Engineered Nanostructures X, 112890I (10 March 2020); https://doi.org/10.1117/12.2555112
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:101864
Collection:CaltechAUTHORS
Deposited By: George Porter
Deposited On:11 Mar 2020 22:45
Last Modified:11 Mar 2020 22:45

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