Pearson, Phillippe and Kamali, Seyedeh Mahsa and Afshinmanesh, Farzaneh and Navrazhnykh, Luizetta and Ng, Ryan and Faraon, Andrei and Greer, Julia R. (2020) Scalable fabrication of nano-architected materials using 3D interference lithography with metasurfaces at visible wavelengths (Conference Presentation). In: Photonic and Phononic Properties of Engineered Nanostructures X. Proceedings of SPIE. No.11289. Society of Photo-optical Instrumentation Engineers (SPIE) , Bellingham, WA, Art. No. 112890I. ISBN 9781510633414. https://resolver.caltech.edu/CaltechAUTHORS:20200311-151707535
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Abstract
Nano-architected materials have the potential to be adopted in several areas including photonic devices and structural materials. We present a 3D interference lithography technique with dielectric metasurfaces at visible wavelengths that allows patterning of thick epoxide films over areas on the order of 10 cm^2 with 100 nm resolution. By leveraging the ability of the metasurface to control the amplitude and phase of a wavefront, complex near-field 3D interference patterns can be designed. Pyrolysis of 3D patterned SU-8 produces a carbon-based material with sub-100 nm features and enhanced mechanical properties.
| Item Type: | Book Section | ||||||||||
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| Additional Information: | © 2020 Society of Photo-Optical Instrumentation Engineers (SPIE). | ||||||||||
| Series Name: | Proceedings of SPIE | ||||||||||
| Issue or Number: | 11289 | ||||||||||
| Record Number: | CaltechAUTHORS:20200311-151707535 | ||||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20200311-151707535 | ||||||||||
| Official Citation: | Phillippe Pearson, Seyedeh Mahsa Kamali, Farzaneh Afshinmanesh, Luizetta Navrazhnykh, Ryan Ng, Andrei Faraon, and Julia R. Greer "Scalable fabrication of nano-architected materials using 3D interference lithography with metasurfaces at visible wavelengths (Conference Presentation)", Proc. SPIE 11289, Photonic and Phononic Properties of Engineered Nanostructures X, 112890I (10 March 2020); https://doi.org/10.1117/12.2555112 | ||||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||||||
| ID Code: | 101864 | ||||||||||
| Collection: | CaltechAUTHORS | ||||||||||
| Deposited By: | George Porter | ||||||||||
| Deposited On: | 11 Mar 2020 22:45 | ||||||||||
| Last Modified: | 11 Mar 2020 22:45 |
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