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Optimization of the experimental conditions for the preparation of a thin strontium titanate film by hydrothermal process

Yang, Wein-Duo and Hung, Kun-Ming (2002) Optimization of the experimental conditions for the preparation of a thin strontium titanate film by hydrothermal process. Journal of Materials Science, 37 (7). pp. 1337-1342. ISSN 0022-2461. doi:10.1023/a:1014560310260. https://resolver.caltech.edu/CaltechAUTHORS:20200324-074259156

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Abstract

A Taguchi orthogonal array design was implemented to optimize the experimental conditions for the preparation of a thin strontium titanate film on a Ti substrate using a hydrothermal process. The effects of such preparatory conditions as the strontium-concentration, pH-value, reaction temperature, reaction time and the substrate surface treatment were systematically studied. Results indicate that the effects of the reaction temperature and reaction time are the key variables influencing the relative crystal intensity (intensity of (110) SrTiO₃ peaks in XRD spectrum/intensity of (101) Ti peak in XRD spectrum) of the films obtained. By combining the optimal settings of the two most influential process variables, a polycrystalline, SrTiO₃-films was obtained, with improved crystallinity and a grain size of 0.2–0.4 μm and a dielectric constant of 360 at I MHz.


Item Type:Article
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https://doi.org/10.1023/a:1014560310260DOIArticle
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Additional Information:© 2002 Kluwer Academic Publishers. Received 10 April and accepted 11 December 2001. The author thanks the National Science Council, NSC 89-2214-E-151-004, for the financial support of this work.
Funders:
Funding AgencyGrant Number
National Science Council (Taipei)NSC 89-2214-E-151-004
Subject Keywords:Dielectric Constant; Reaction Temperature; Strontium; Process Variable; Optimal Setting
Issue or Number:7
DOI:10.1023/a:1014560310260
Record Number:CaltechAUTHORS:20200324-074259156
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20200324-074259156
Official Citation:Yang, W., Hung, K. Optimization of the experimental conditions for the preparation of a thin strontium titanate film by hydrothermal process. Journal of Materials Science 37, 1337–1342 (2002). https://doi.org/10.1023/A:1014560310260
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:102070
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:24 Mar 2020 15:46
Last Modified:16 Nov 2021 18:08

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