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Cosputtered composition-spread reproducibility established by high-throughput x-ray fluorescence

Gregoire, John M. and Dale, Darren and Kazimirov, Alexander and DiSalvo, Francis J. and van Dover, R. Bruce (2010) Cosputtered composition-spread reproducibility established by high-throughput x-ray fluorescence. Journal of Vacuum Science and Technology A, 28 (5). pp. 1279-1280. ISSN 0734-2101. PMCID PMC4043122.

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We describe the characterization of sputtered yttria-zirconia composition spread thin films by x-ray fluorescence (XRF). We also discuss our automated analysis of the XRF data, which was collected in a high throughput experiment at the Cornell High Energy Synchrotron Source. The results indicate that both the composition reproducibility of the library deposition and the composition measurements have a precision of better than 1 atomic percent.

Item Type:Article
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URLURL TypeDescription CentralArticle
Gregoire, John M.0000-0002-2863-5265
Additional Information:© 2010 American Vacuum Society. Received 4 June 2010; accepted 20 July 2010; published 3 September 2010. This material is based on the work supported as part of the Energy Materials Center at Cornell (EMC2), an Energy Frontier Research Center funded by the U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences under Award No. DE-SC0001086. This work is based on the research conducted at the Cornell High Energy Synchrotron Source (CHESS), which is supported by the National Science Foundation and the National Institutes of Health/National Institute of General Medical Sciences under NSF Award No. DMR-0225180.
Funding AgencyGrant Number
Department of Energy (DOE)DE-SC0001086
Issue or Number:5
PubMed Central ID:PMC4043122
Record Number:CaltechAUTHORS:20200407-132649138
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:102390
Deposited By: Tony Diaz
Deposited On:07 Apr 2020 21:12
Last Modified:07 Apr 2020 21:12

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