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MEMS flow sensors for nano-fluidic applications

Wu, S. and Lin, Q. and Yuen, Y. and Tai, Y. C. (2000) MEMS flow sensors for nano-fluidic applications. In: International Conference on Micro Electro Mechanical Systems, 13th, MEMS 2000. IEEE , Piscataway, NJ, pp. 745-750. ISBN 0-7803-5273-4.

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This paper presents micromachined thermal sensors for measuring liquid flow rates in the nanoliter-per-minute range. The sensors use a boron-doped polysilicon thinfilm heater that is embedded in the silicon nitride wall of a microchannel. The boron doping is chosen to increase the heater’s temperature coefficient of resistance within tolerable noise limits, and the microchannel is suspended from the substrate to improve thermal isolation. The sensors have demonstrated a flow rate resolution below 10 nL/min, as well as the capability for detecting micro bubbles in the liquid. Heat transfer simulation has also been performed to explain the sensor operation and yielded good agreement with experimental data.

Item Type:Book Section
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Tai, Y. C.0000-0001-8529-106X
Additional Information:© 2000 IEEE. Reprinted with Permission. Publication Date: 23-27 Jan. 2000. This work was sponsored by the Microsystems Technology Office of Defense Advanced Research Projects Agency (DARPA/MTO) and the Air Force Office of Scientific Research (USAF), under grant/contract number 49620-96-1-0376. The authors would like to thank Trevor Roper and Xuan-Qi Wang for their help with the process.
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Air Force Office of Scientific Research (AFOSR)49620-96-1-0376
Subject Keywords:flow measurement; microfluidics; micromachining; microsensors; MEMS flow sensor; Si:B; Si3N4; boron doping; heat transfer simulation; liquid flow measurement; micro bubble detection; microchannel flow; micromachining; nano-fluidic system; noise; polysilicon thin film heater; silicon nitride wall; temperature coefficient of resistance; thermal isolation; thermal sensor
Record Number:CaltechAUTHORS:WUSmems00
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Official Citation:S. Wu, Q. Lin, Y. Yuen and Y. C. Tai, "MEMS flow sensors for nano-fluidic applications," Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), Miyazaki, Japan, 2000, pp. 745-750. doi: 10.1109/MEMSYS.2000.838611
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:10457
Deposited On:09 May 2008
Last Modified:08 Nov 2021 21:08

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