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A new sputtering apparatus

Badger, Richard M. (1926) A new sputtering apparatus. Journal of the Optical Society of America and Review of Scientific Instruments, 13 (4). pp. 513-515. ISSN 0093-4119.

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The writer, in sputtering a large number of mirrors, has found that the apparatus and methods to be described have several advantages, particularly where very large and perfect mirrors are desired. The accompanying diagram will be self explanatory, and the dimensions given have been found convenient for mirrors up to 10 cm diameter.

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Additional Information:© Copyright 1926 Optical Society of America. Received February 11, 1926. We are indebted to Mr. Julius Pearson of the instrument shop of this Institute for this detail of construction.
Issue or Number:4
Record Number:CaltechAUTHORS:BADjosa26
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Official Citation:R. M. Badger, "A new sputtering apparatus," J. Opt. Soc. Am. 13, 513- (1926)
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:10463
Deposited By: Archive Administrator
Deposited On:07 May 2008
Last Modified:03 Oct 2019 00:09

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