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Rapid fabrication of high-resolution multi-scale microfluidic devices based on the scanning of patterned femtosecond laser

Zhang, Chenchu and Zhang, Jianming and Chen, Renfei and Li, Jiawen and Wang, Chaowei and Cao, Rui and Zhang, Jingjing and Ye, Hanchang and Zhai, Hua and Sugioka, Koji (2020) Rapid fabrication of high-resolution multi-scale microfluidic devices based on the scanning of patterned femtosecond laser. Optics Letters, 45 (14). pp. 3929-3932. ISSN 0146-9592. https://resolver.caltech.edu/CaltechAUTHORS:20200813-094025869

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Abstract

Femtosecond-laser-induced two-photon polymerization has distinct advantages in micro-nanofabrication due to its intrinsic three-dimensional processing capability and high precision with sub-100 nanometer fabrication resolution. However, the high resolution causes a drawback in fabricating large-scale structures due to unacceptably long processing times. To solve this problem, we applied the patterned focus as the basic element for scanning processing. Theoretically, the relationship between patterned-focus scanning parameters and the uniformity of scanned light field was analyzed and optimized. Experimentally, we quantitatively investigated the relationship between the microstructure surface quality and the parameters of patterned-focus scanning. Based on above, we put forward a hybrid method that combines the femtosecond laser patterned exposure with direct-writing fabrication to rapidly fabricate large-scale microfluidic devices for various practical applications.


Item Type:Article
Related URLs:
URLURL TypeDescription
https://doi.org/10.1364/ol.397078DOIArticle
ORCID:
AuthorORCID
Li, Jiawen0000-0003-3950-6212
Cao, Rui0000-0003-4444-7528
Sugioka, Koji0000-0001-5833-1118
Additional Information:© 2020 Optical Society of America. Received 7 May 2020; revised 1 June 2020; accepted 1 June 2020; posted 8 June 2020 (Doc. ID 397078); published 10 July 2020. We acknowledge the Experimental Center of Engineering and Materials Sciences at USTC for the fabrication and measurement of the samples. This work was partly carried out at the USTC Center for Micro and Nanoscale Research and Fabrication. Funding: National Key Research and Development Program of China (2018YFB1105400); National Natural Science Foundation of China (11801126, 51675503, 51805509, 51875544, 61805230); the Aeronautical Science Fund (2018ZE78004); Fundamental Research Funds for the Central Universities (JZ2019YYPY0024, WK2090000011, WK2090000013, WK603000103, WK603000131); Youth Innovation Promotion Association of the Chinese Academy of Sciences (2017495); Foundation of Equipment Development Department (62209140 10901). Disclosures: The authors declare no conflicts of interest.
Funders:
Funding AgencyGrant Number
National Basic Research Program of China2018YFB1105400
National Natural Science Foundation of China11801126
National Natural Science Foundation of China51675503
National Natural Science Foundation of China51805509
National Natural Science Foundation of China51875544
National Natural Science Foundation of China61805230
Chinese Aeronautical Establishment2018ZE78004
Fundamental Research Funds for the Central UniversitiesJZ2019YYPY0024
Fundamental Research Funds for the Central UniversitiesWK2090000011
Fundamental Research Funds for the Central UniversitiesWK2090000013
Fundamental Research Funds for the Central UniversitiesWK603000103
Fundamental Research Funds for the Central UniversitiesWK603000131
Youth Innovation Promotion Association of the Chinese Academy of Sciences2017495
Foundation of Equipment Development Department62209140 10901
Issue or Number:14
Record Number:CaltechAUTHORS:20200813-094025869
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20200813-094025869
Official Citation:Chenchu Zhang, Jianming Zhang, Renfei Chen, Jiawen Li, Chaowei Wang, Rui Cao, Jingjing Zhang, Hanchang Ye, Hua Zhai, and Koji Sugioka, "Rapid fabrication of high-resolution multi-scale microfluidic devices based on the scanning of patterned femtosecond laser," Opt. Lett. 45, 3929-3932 (2020)
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:104951
Collection:CaltechAUTHORS
Deposited By: George Porter
Deposited On:13 Aug 2020 17:22
Last Modified:13 Aug 2020 17:24

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