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Aluminum Oxide Nanoparticle Films Deposited from a Nonthermal Plasma: Synthesis, Characterization, and Crystallization

Li, Zhaohan and Wray, Parker R. and Su, Magel P. and Tu, Qiaomiao and Andaraarachchi, Himashi P. and Jeong, Yong Jin and Atwater, Harry A. and Kortshagen, Uwe R. (2020) Aluminum Oxide Nanoparticle Films Deposited from a Nonthermal Plasma: Synthesis, Characterization, and Crystallization. ACS Omega, 5 (38). pp. 24754-24761. ISSN 2470-1343. PMCID PMC7528284. doi:10.1021/acsomega.0c03353.

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Aluminum oxide, both in amorphous and crystalline forms, is a widely used inorganic ceramic material because of its chemical and structural properties. In this work, we synthesized amorphous aluminum oxide nanoparticles using a capacitively coupled nonthermal plasma utilizing trimethylaluminum and oxygen as precursors and studied their crystallization and phase transformation behavior through postsynthetic annealing. The use of two reactor geometries resulted in amorphous aluminum oxide nanoparticles with similar compositions but different sizes. Size tuning of these nanoparticles was achieved by varying the reactor pressure to produce amorphous aluminum oxide nanoparticles ranging from 6 to 22 nm. During postsynthetic annealing, powder samples of amorphous nanoparticles began to crystallize at 800 °C, forming crystalline θ and γ phase alumina. Their phase transformation behavior was found to be size-dependent in that powders of small 6 nm amorphous particles transformed to form phase-pure α-Al₂O₃ at 1100 °C, while powders of large 11 nm particles remained in the θ and γ phases. This phenomenon is attributed to the fast rate of densification and neck formation in small amorphous aluminum oxide particles.

Item Type:Article
Related URLs:
URLURL TypeDescription CentralArticle
Li, Zhaohan0000-0002-8155-7243
Wray, Parker R.0000-0003-3384-0826
Su, Magel P.0000-0003-4898-5024
Tu, Qiaomiao0000-0001-7478-8687
Andaraarachchi, Himashi P.0000-0001-9736-1088
Jeong, Yong Jin0000-0003-4479-7683
Atwater, Harry A.0000-0001-9435-0201
Kortshagen, Uwe R.0000-0001-5944-3656
Additional Information:© 2020 American Chemical Society. This is an open access article published under a Creative Commons Non-Commercial No Derivative Works (CC-BY-NC-ND) Attribution License, which permits copying and redistribution of the article, and creation of adaptations, all for non-commercial purposes. Received: July 13, 2020; Accepted: August 31, 2020; Published: September 14, 2020. This work is supported by the Army Research Office under MURI project under W911NF-18-1-0240. Parts of this work were carried out in the Characterization Facility, University of Minnesota, which receives partial support from the National Science Foundation through the MRSEC program grant DMR-1420013. The authors declare no competing financial interest.
Funding AgencyGrant Number
Army Research Office (ARO)W911NF-18-1-0240
Subject Keywords:Granular materials, Oxides, Nanoparticles, Metal oxide nanoparticles, Phase transitions
Issue or Number:38
PubMed Central ID:PMC7528284
Record Number:CaltechAUTHORS:20200915-115018306
Persistent URL:
Official Citation:Aluminum Oxide Nanoparticle Films Deposited from a Nonthermal Plasma: Synthesis, Characterization, and Crystallization. Zhaohan Li, Parker R. Wray, Magel P. Su, Qiaomiao Tu, Himashi P. Andaraarachchi, Yong Jin Jeong, Harry A. Atwater, and Uwe R. Kortshagen. ACS Omega 2020 5 (38), 24754-24761; DOI: 10.1021/acsomega.0c03353
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:105387
Deposited By: George Porter
Deposited On:15 Sep 2020 20:09
Last Modified:16 Nov 2021 18:42

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