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Suspended Nanoscale Field Emitter Devices for High-Temperature Operation

De Rose, Lucia B. and Scherer, Axel and Jones, William M. (2020) Suspended Nanoscale Field Emitter Devices for High-Temperature Operation. IEEE Transactions on Electron Devices, 67 (11). pp. 5125-5131. ISSN 0018-9383.

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In this work, we demonstrate suspended two- and four-terminal field emission devices for high-temperature operation. The planar structures were fabricated with tungsten on a 200-nm silicon nitride membrane. The insulator in the vicinity of the terminals was removed to minimize undesirable Frenkel–Poole emission and increase the resistance of leakage current pathways. The effects of temperatures up to 450 °C on Fowler–Nordheim emission characteristics and parasitic leakage resistance were studied. Turn-on voltages with magnitudes under 15 V that further decreased as a function of increasing temperature for the two-terminal device were reported. Gating at temperatures of 150 °C and 300 °C was shown for the four-terminal device, and corresponding transconductance and cutoff frequency values were computed.

Item Type:Article
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URLURL TypeDescription
De Rose, Lucia B.0000-0002-1432-8248
Jones, William M.0000-0003-1218-4778
Additional Information:© 2020 IEEE. This work is licensed under a Creative Commons Attribution 4.0 License. Manuscript received June 26, 2020; revised August 20, 2020; accepted August 24, 2020. Date of publication September 9, 2020; date of current version October 22, 2020. This work was supported in part by the NASA/ROSES HOTTECH Program 80HQTR17C0011 under a subcontract from the Boeing Company and in part by the President and Director’s Fund at the California Institute of Technology and the Jet Propulsion Laboratory underAward 1614028. The review of this article was arranged by Editor M. Blank. The authors gratefully acknowledge many technical discussions and guidance from Dr. Leora Peltz and Robert Frampton from The Boeing Company. This research was carried out in part at the Jet Propulsion Laboratory, California Institute of Technology, under a contract with the National Aeronautics and Space Administration.
Funding AgencyGrant Number
Caltech President’s FundUNSPECIFIED
Subject Keywords:Electron emission, Fowler–Nordheim field emission, Frenkel–Poole emission, high-temperature, leakage current, metallic emitter, vacuum microelectronics
Issue or Number:11
Record Number:CaltechAUTHORS:20200923-124926276
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Official Citation:L. B. De Rose, A. Scherer and W. M. Jones, "Suspended Nanoscale Field Emitter Devices for High-Temperature Operation," in IEEE Transactions on Electron Devices, vol. 67, no. 11, pp. 5125-5131, Nov. 2020, doi: 10.1109/TED.2020.3019765
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:105495
Deposited By: Tony Diaz
Deposited On:23 Sep 2020 20:24
Last Modified:06 Nov 2020 17:39

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