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High-Q suspended optical resonators in 3C-SiC obtained by thermal annealing

Powell, Keith and Shams-Ansari, Amirhassan and Desai, Smit and Austin, Mitchell and Deng, Jiangdong and Sinclair, Neil and Lončar, Marko and Yi, Xiaoke (2020) High-Q suspended optical resonators in 3C-SiC obtained by thermal annealing. In: 2020 Conference on Lasers and Electro-Optics (CLEO). Optical Society of America , Washington, DC, Art. No. Tu3P.3. ISBN 9781943580767. https://resolver.caltech.edu/CaltechAUTHORS:20200925-133309823

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Abstract

We fabricate suspended single-mode optical waveguides and ring resonators in 3C-SiC that operate at telecommunication wavelength, leverage post-fabrication thermal annealing to minimize optical propagation losses and demonstrate Q of over 41,000.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1364/cleo_si.2020.stu3p.3DOIArticle
https://ieeexplore.ieee.org/abstract/document/9193222PublisherArticle
https://resolver.caltech.edu/CaltechAUTHORS:20200409-115739017Related ItemJournal Article
ORCID:
AuthorORCID
Shams-Ansari, Amirhassan0000-0002-2165-7832
Lončar, Marko0000-0002-5029-5017
Additional Information:© 2020 The Author(s). This work was carried out at the Harvard Center for Nanoscale Systems (CNS), a member of the National Nanotechnology Infrastructure Network (NNIN).
Record Number:CaltechAUTHORS:20200925-133309823
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20200925-133309823
Official Citation:K. Powell, A. Shams-Ansari, S. Desai, M. Austin, J. Deng, N. Sinclair, M. Loncar, and X. Yi, "High-Q suspended optical resonators in 3C-SiC obtained by thermal annealing," in Conference on Lasers and Electro-Optics, OSA Technical Digest (Optical Society of America, 2020), paper STu3P.3
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:105560
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:25 Sep 2020 21:31
Last Modified:25 Sep 2020 21:31

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