Powell, Keith and Shams-Ansari, Amirhassan and Desai, Smit and Austin, Mitchell and Deng, Jiangdong and Sinclair, Neil and Lončar, Marko and Yi, Xiaoke (2020) High-Q suspended optical resonators in 3C-SiC obtained by thermal annealing. In: 2020 Conference on Lasers and Electro-Optics (CLEO). Optical Society of America , Washington, DC, Art. No. Tu3P.3. ISBN 9781943580767. https://resolver.caltech.edu/CaltechAUTHORS:20200925-133309823
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Abstract
We fabricate suspended single-mode optical waveguides and ring resonators in 3C-SiC that operate at telecommunication wavelength, leverage post-fabrication thermal annealing to minimize optical propagation losses and demonstrate Q of over 41,000.
| Item Type: | Book Section | ||||||||||||
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| Additional Information: | © 2020 The Author(s). This work was carried out at the Harvard Center for Nanoscale Systems (CNS), a member of the National Nanotechnology Infrastructure Network (NNIN). | ||||||||||||
| DOI: | 10.1364/cleo_si.2020.stu3p.3 | ||||||||||||
| Record Number: | CaltechAUTHORS:20200925-133309823 | ||||||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20200925-133309823 | ||||||||||||
| Official Citation: | K. Powell, A. Shams-Ansari, S. Desai, M. Austin, J. Deng, N. Sinclair, M. Loncar, and X. Yi, "High-Q suspended optical resonators in 3C-SiC obtained by thermal annealing," in Conference on Lasers and Electro-Optics, OSA Technical Digest (Optical Society of America, 2020), paper STu3P.3 | ||||||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||||||||
| ID Code: | 105560 | ||||||||||||
| Collection: | CaltechAUTHORS | ||||||||||||
| Deposited By: | Tony Diaz | ||||||||||||
| Deposited On: | 25 Sep 2020 21:31 | ||||||||||||
| Last Modified: | 16 Nov 2021 18:44 |
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