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Hertz-linewidth semiconductor lasers using CMOS-ready ultra-high-Q microresonators

Jin, Warren and Yang, Qi-Fan and Chang, Lin and Shen, Boqiang and Wang, Heming and Leal, Mark A. and Wu, Lue and Gao, Maodong and Feshali, Avi and Paniccia, Mario and Vahala, Kerry J. and Bowers, John E. (2021) Hertz-linewidth semiconductor lasers using CMOS-ready ultra-high-Q microresonators. Nature Photonics, 15 (5). pp. 346-353. ISSN 1749-4885. doi:10.1038/s41566-021-00761-7. https://resolver.caltech.edu/CaltechAUTHORS:20201030-122744708

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Abstract

Driven by narrow-linewidth bench-top lasers, coherent optical systems spanning optical communications, metrology and sensing provide unrivalled performance. To transfer these capabilities from the laboratory to the real world, a key missing ingredient is a mass-produced integrated laser with superior coherence. Here, we bridge conventional semiconductor lasers and coherent optical systems using CMOS-foundry-fabricated microresonators with a high Q factor of over 260 million and finesse over 42,000. A five-orders-of-magnitude noise reduction in the pump laser is demonstrated, enabling a frequency noise of 0.2 Hz² Hz⁻¹ to be achieved in an electrically pumped integrated laser, with a corresponding short-term linewidth of 1.2 Hz. Moreover, the same configuration is shown to relieve the dispersion requirements for microcomb generation that have handicapped certain nonlinear platforms. The simultaneous realization of this high Q factor, highly coherent lasers and frequency combs using foundry-based technologies paves the way for volume manufacturing of a wide range of coherent optical systems.


Item Type:Article
Related URLs:
URLURL TypeDescription
https://doi.org/10.1038/s41566-021-00761-7DOIArticle
https://rdcu.be/ciYFcPublisherFree ReadCube access
https://doi.org/10.1038/s41566-021-00805-yDOIPublisher Correction
https://rdcu.be/ciYFkPublisherFree ReadCube access - Publisher Correction
https://arxiv.org/abs/2009.07390arXivDiscussion Paper
ORCID:
AuthorORCID
Jin, Warren0000-0002-4297-7982
Shen, Boqiang0000-0003-0697-508X
Wang, Heming0000-0003-3861-0624
Leal, Mark A.0000-0002-6779-3741
Wu, Lue0000-0002-7503-7057
Vahala, Kerry J.0000-0003-1783-1380
Bowers, John E.0000-0003-4270-8296
Additional Information:© 2021 Nature Publishing Group. Received 06 July 2020; Accepted 07 January 2021; Published 11 February 2021. We acknowledge support from the Defense Advanced Research Projects Agency (DARPA) under the DODOS (HR0011-15-C-055) and APHI (FA9453-19-C-0029) programmes and Anello Photonics. Data availability: All data generated or analysed during this study are available within the paper and its Supplementary Information. Further source data will be made available on reasonable request. Code availability: The analysis codes will be made available on reasonable request. These authors contributed equally: Warren Jin, Qi-Fan Yang, Lin Chang, Boqiang Shen, Heming Wang. Author Contributions: The experiments were conceived by W.J., Q.-F.Y., L.C., B.S. and H.W. The devices were designed by W.J. and A.F. Measurements were performed by W.J., Q.-F.Y., L.C., B.S. and H.W., with assistance from M.A.L., L.W. and M.G. Analysis of the results was conducted by W.J., Q.-F.Y. and H.W. The project was coordinated by Q.-F.Y. and L.C. under the supervision of J.E.B., K.J.V. and M.P. All authors participated in writing the manuscript. The authors declare no competing interests. Peer review information: Nature Photonics thanks Andrey Matsko, Michael Watts and the other, anonymous, reviewer(s) for their contribution to the peer review of this work.
Errata:Jin, W., Yang, QF., Chang, L. et al. Publisher Correction: Hertz-linewidth semiconductor lasers using CMOS-ready ultra-high-Q microresonators. Nat. Photonics (2021). https://doi.org/10.1038/s41566-021-00805-y
Funders:
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)HR0011-15-C-055
Defense Advanced Research Projects Agency (DARPA)FA9453-19-C-0029
Anello PhotonicsUNSPECIFIED
Subject Keywords:Microresonators; Mode-locked lasers; Nonlinear optics; Semiconductor lasers
Issue or Number:5
DOI:10.1038/s41566-021-00761-7
Record Number:CaltechAUTHORS:20201030-122744708
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20201030-122744708
Official Citation:Jin, W., Yang, QF., Chang, L. et al. Hertz-linewidth semiconductor lasers using CMOS-ready ultra-high-Q microresonators. Nat. Photonics 15, 346–353 (2021). https://doi.org/10.1038/s41566-021-00761-7
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:106360
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:30 Oct 2020 21:07
Last Modified:29 Apr 2021 22:44

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