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Advances in microbolometers

Neikirk, D. P. and Lam, Wayne W. and Rutledge, D. B. (1983) Advances in microbolometers. In: 1983 Eighth International Conference on Infrared and Millimeter Waves. IEEE , Piscataway, NJ, pp. 1-3. ISBN 9781728120386.

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The bismuth microbolometer is a simple, easily made detector suitable for use throughout the far-infrared. A novel photoresist fabrication procedure has made it possible to obtain an electrical NEP of 2.8×10⁻¹¹ W (Hz)^(−1/2) at 100kHz for an airbridge bolometer. By using a polyimide plastic as an insulator, conventional substrate-supported devices with an NEP of 3.2×10⁻¹¹ W(Hz)^(−1/2) have also been made.

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Additional Information:© 1983 IEEE. We would like to acknowledge the support of the Department of Energy under contract DEAM03-765F-00010 Task IIA, the Army Research Office under contract DAAG29-82-K-0165,and the Jet Propulsion Laboratory through Dr. M. Litvak.
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Department of Energy (DOE)DEAM03-765F-00010
Army Research Office (ARO)DAAG29-82-K-0165
Record Number:CaltechAUTHORS:20201104-080419245
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Official Citation:D. P. Neikirk, W. W. Lam and D. B. Rutledge, "Advances in microbolometers," 1983 Eighth International Conference on Infrared and Millimeter Waves, Miami Beach, FL, USA, 1983, pp. 1-3, doi: 10.1109/IRMM.1983.9126431
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:106417
Deposited By: Tony Diaz
Deposited On:04 Nov 2020 20:47
Last Modified:16 Nov 2021 18:53

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