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Quantifying low fluence ion implants in diamond-like carbon film by secondary ion mass spectrometry by understanding matrix effects

Jurewicz, Amy J. G. and Olinger, Chad T. and Burnett, Donald S. and Guan, Yunbin and Hervig, Richard and Rieck, Karen D. and Woolum, Dorothy S. (2021) Quantifying low fluence ion implants in diamond-like carbon film by secondary ion mass spectrometry by understanding matrix effects. Journal of Analytical Atomic Spectrometry, 36 (1). pp. 194-209. ISSN 0267-9477. doi:10.1039/d0ja00375a.

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Minor and trace elements in diamond-like carbon (DLC) are difficult to quantify using SIMS analysis because minor elemental and structural variations can result in major matrix effects even across individual, cm-sized samples. While this material is most commonly used for tribological coatings where minor element composition is not of critical importance, it is being increasingly used in electronic devices. However, it is a unique application that spurred this work: anhydrous, tetrahedrally-coordinated DLC (ta-C) was used as a solar wind (SW) collector material in the Genesis solar-wind sample return mission (NASA Discovery 5). So, for ∼15 years, we have been working on attaining accurate and precise measurement of minor and trace elements in the Genesis DLC using SIMS to achieve our mission goals. Specifically, we have learned to deal with relevant matrix effects in our samples, ion implants into ta-C. Our unknown element for quantification is SW Mg, a low-dose (1.67 × 10¹² at cm⁻²; ∼6 μg g⁻¹ ²⁴Mg), low-energy (∼24 keV average energy) implant; our standard is a high-dose (∼1 × 10¹⁴ at cm⁻² of both ²⁵Mg, ²⁶Mg) 75 keV laboratory implant for which the absolute ²⁶Mg/²⁵Mg ratio had been measured to account for variable instrumental mass fractionation. Analyses were performed using O₂⁺ primary ions having both a low impact energy and a current density of ∼2 × 10¹⁴ ions per cm². Although our unknown was solar wind, the method is applicable to many situations where minor elements in DLC need to be quantified. Recommendations are presented for modifying this data-reduction technique for other SIMS conditions.

Item Type:Article
Related URLs:
URLURL TypeDescription
Jurewicz, Amy J. G.0000-0002-3282-5782
Olinger, Chad T.0000-0002-9509-6345
Burnett, Donald S.0000-0001-9521-8675
Guan, Yunbin0000-0002-7636-3735
Hervig, Richard0000-0001-7892-5423
Rieck, Karen D.0000-0002-7427-9134
Woolum, Dorothy S.0000-0002-4461-0906
Additional Information:© The Author(s) 2021. This article is licensed under a Creative Commons Attribution-NonCommercial 3.0 Unported Licence. Received 15th August 2020. Accepted 13th November 2020. SIMS analyses were performed at Arizona State University National SIMS facility, supported by EAR0622775. This work was initiated using Genesis mission funds, including JPL sub-contract #1354958. Subsequent work was supported by NASA LARS Grants # NNX14AF26G and 80NSSC17K0025 (DSB, AJ), NNH15AZ25I and NNH15AZ67I (KDR). G. Huss worked in parallel with this team on his H measurements and provided samples for Raman Spectroscopy and is greatly appreciated. Thanks to J. Ziegler, USNA Annapolis for advice on SRIM, L. Williams for oversight using the ASU Cameca IMS 6f. Tom Friedmann provided significant insight into the material properties of the DLC made at Sandia National Laboratory. Thanks also to the two anonymous reviewers for their suggestions and support for this work.
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ID Code:107939
Deposited By: George Porter
Deposited On:05 Feb 2021 23:38
Last Modified:16 Nov 2021 19:07

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