A Caltech Library Service

Nano-electromechanical Tuning of Dual-Mode Resonant Dielectric Metasurfaces for Dynamic Amplitude and Phase Modulation

Kwon, Hyounghan and Zheng, Tianzhe and Faraon, Andrei (2021) Nano-electromechanical Tuning of Dual-Mode Resonant Dielectric Metasurfaces for Dynamic Amplitude and Phase Modulation. Nano Letters, 21 (7). pp. 2817-2823. ISSN 1530-6984. doi:10.1021/acs.nanolett.0c04888.

[img] PDF - Supplemental Material
See Usage Policy.


Use this Persistent URL to link to this item:


Planar all-dielectric photonic crystals or metasurfaces host various resonant eigenmodes including leaky guided mode resonances (GMR) and bound states in the continuum (BIC). Engineering these resonant modes can provide new opportunities for diverse applications. Particularly, electrical control of the resonances will boost development of the applications by making them tunable. Here, we experimentally demonstrate nano-electromechanical tuning of both the GMR and the quasi-BIC modes in the telecom wavelength range. With electrostatic forces induced by a few volts, the devices achieve spectral shifts over 5 nm, absolute intensity modulation over 40%, and modulation speed exceeding 10 kHz. We also show that the interference between two resonances enables the enhancement of the phase response when two modes are overlapped in spectrum. A phase shift of 144° is experimentally observed with a bias of 4 V. Our work suggests a direct route toward optical modulators through the engineering of GMRs and quasi-BIC resonances.

Item Type:Article
Related URLs:
URLURL TypeDescription
Kwon, Hyounghan0000-0002-9257-687X
Zheng, Tianzhe0000-0001-7058-5196
Faraon, Andrei0000-0002-8141-391X
Additional Information:© 2021 American Chemical Society. Received: December 12, 2020; Revised: February 1, 2021; Published: February 5, 2021. We thank Jeong Oen Lee for helpful discussion about nano-electromechanical systems. This work was supported by the National Institutes of Health (NIH) brain initiative program, grant NIH 1R21EY029460-01. The device nanofabrication was performed at the Kavli Nanoscience Institute at Caltech. H.K. acknowledges a fellowship from Ilju organization. Author Contributions. H.K. and T.Z. contributed equally. H.K. and A.F. conceived the project. H.K. designed the device. H.K. and T.Z. fabricated the samples, performed the measurements, and analyzed the data. All authors cowrote the manuscript. The authors declare no competing financial interest.
Group:Kavli Nanoscience Institute
Funding AgencyGrant Number
Ilju Foundation of Education & CultureUNSPECIFIED
Subject Keywords:Photonic crystal, Metasurface, NEMS, Bound states in the continuum, Guided mode resonance, Optical modulator
Issue or Number:7
Record Number:CaltechAUTHORS:20210208-144010825
Persistent URL:
Official Citation:Nano-electromechanical Tuning of Dual-Mode Resonant Dielectric Metasurfaces for Dynamic Amplitude and Phase Modulation. Hyounghan Kwon, Tianzhe Zheng, and Andrei Faraon. Nano Letters 2021 21 (7), 2817-2823; DOI: 10.1021/acs.nanolett.0c04888
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:107958
Deposited By: George Porter
Deposited On:09 Feb 2021 15:09
Last Modified:19 Apr 2021 18:59

Repository Staff Only: item control page