Nikzad, Shouleh and Ahn, Channing C. and Atwater, Harry A. (1992) Quantitative analysis of semiconductor alloy composition during growth by reflection-electron energy loss spectroscopy. Journal of Vacuum Science and Technology B, 10 (2). pp. 762-765. ISSN 1071-1023. doi:10.1116/1.586443. https://resolver.caltech.edu/CaltechAUTHORS:NIKjvstb92
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Abstract
Determination of alloy composition during epitaxial growth of GexSi1–x alloys has been demonstrated using reflection-electron energy loss spectroscopy (REELS) at reflection high-energy electron diffraction (RHEED) energies. Measurements of inelastic scattering intensities from Si K (1840 eV) and Ge L2,3 (1217 eV) core losses were performed using a conventional RHEED gun together with an electron energy loss spectrometer in a molecular beam epitaxy system. Comparison of ex situ composition measurements by Rutherford backscattering and energy dispersive x-ray spectroscopy in a transmission electron microscope indicate excellent agreement with composition determination by REELS, demonstrating the capability of REELS as a quantitative in situ analysis technique. Application of REELS to other semiconductors is discussed and initial results for III–V and II–VI semiconductor alloys (GaAs, CdTe, and ZnTe) are also presented.
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| Additional Information: | © 1992 American Vacuum Society. (Received 16 September 1991; accepted 29 October 1991) This work was supported by the National Science Foundation P.Y.I.A. program (DMR-8958070) and the Materials Research Group program (DMR-8811795), as well as the Caltech Consortium in Chemistry and Chemical Engineering. We thank Dr. Jack Dinan for providing the II-VI smaple, and Bart Stevens for the help with the RBS measurements. Philips Electronics Instruments is acknowledged for the loan of the spectrometer. | ||||||||
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| Subject Keywords: | RHEED; SEMICONDUCTOR ALLOYS; MOLECULAR BEAM EPITAXY; ENERGY–LOSS SPECTROSCOPY; GERMANIUM ALLOYS; SILICON ALLOYS; GALLIUM ARSENIDES; CADMIUM TELLURIDES; ZINC TELLURIDES; CHEMICAL ANALYSIS; BINARY ALLOYS | ||||||||
| Issue or Number: | 2 | ||||||||
| DOI: | 10.1116/1.586443 | ||||||||
| Record Number: | CaltechAUTHORS:NIKjvstb92 | ||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:NIKjvstb92 | ||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||||
| ID Code: | 11001 | ||||||||
| Collection: | CaltechAUTHORS | ||||||||
| Deposited By: | Archive Administrator | ||||||||
| Deposited On: | 22 Jun 2008 | ||||||||
| Last Modified: | 08 Nov 2021 21:12 |
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