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Fabrication techniques for high-performance Si heterojunction (SHJ) microcells

Phelan, Megan E. and Potter, Maggie M. and Balaji, Pradeep and Jahelka, Phil R. and Bauser, Haley C. and Glaudell, Rebecca and Needell, David R. and Enright, Michael and Augusto, André and Nuzzo, Ralph and Atwater, Harry A. (2021) Fabrication techniques for high-performance Si heterojunction (SHJ) microcells. In: 2021 IEEE 48th Photovoltaic Specialists Conference (PVSC). IEEE , Piscataway, NJ, pp. 330-334. ISBN 978-1-6654-1922-2.

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Silicon heterojunction (SHJ) microcells offer a promising photovoltaic (PV) device for a wide range of micro-electronic applications due to their high performance potential. We examine two separate techniques for dicing SHJ microcells from bulk wafers: deep reactive ion etching (DRIE) and micro-laser cutting. We present the challenges and optimizations for each technique, as well as microcell performance for a 400µm x 400µm x 80µm microcell. Given the thickness of silicon wafers and the low face-to-edge area ratio for SHJ microcells of these dimensions, we consider varied illumination conditions for this structure. SHJ microcells are able to absorb photons along all surfaces; as such, we study microcell performance at each edge interface. We examine both modeled and experimental data of microcells across various lighting conditions and present high-performances for both sets of measurements.

Item Type:Book Section
Related URLs:
URLURL TypeDescription
Phelan, Megan E.0000-0002-4968-7128
Potter, Maggie M.0000-0002-6262-1078
Jahelka, Phil R.0000-0002-1460-7933
Bauser, Haley C.0000-0002-9677-3301
Needell, David R.0000-0001-8343-5883
Enright, Michael0000-0003-1157-1741
Augusto, André0000-0002-2005-0676
Nuzzo, Ralph0000-0003-2310-2045
Atwater, Harry A.0000-0001-9435-0201
Additional Information:© 2021 IEEE. This work was carried out with support from the “Photonics at Thermodynamic Limits” Energy Frontier Research Center funded by the U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences under Award Number DE-SC0019140. Sciences Award Number DE-SC0019140.
Funding AgencyGrant Number
Department of Energy (DOE)DE-SC0019140
Subject Keywords:silicon heterojunction, microcell, photovoltaic
Record Number:CaltechAUTHORS:20211109-231356543
Persistent URL:
Official Citation:M. E. Phelan et al., "Fabrication techniques for high-performance Si heterojunction (SHJ) microcells," 2021 IEEE 48th Photovoltaic Specialists Conference (PVSC), 2021, pp. 0330-0334, doi: 10.1109/PVSC43889.2021.9518579
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:111812
Deposited By: Tony Diaz
Deposited On:11 Nov 2021 19:32
Last Modified:11 Nov 2021 19:32

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