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Development of a 70–110 GHz silicon corrugated horn for cosmic microwave background experiment

Feng, Zhao and Li, Jia-Ning and Li, Zheng-Wei and Xu, Yu-Peng and Liu, Cong-Zhan and Fan, Jin and Shu, Shi‐Bo and Gao, Guan-Hua and Zhang, Yi-Fei and Lu, Xue-Feng and Li, Xu-Fang and Lu, Fang-Jun and Zhang, Ai-Mei and Gu, Yu-Dong and Xu, Yu and Xu, He and Wu, Di and Wang, Ying (2022) Development of a 70–110 GHz silicon corrugated horn for cosmic microwave background experiment. International Journal of RF and Microwave Computer-Aided Engineering, 32 (3). Art. No. e22996. ISSN 1096-4290. doi:10.1002/mmce.22996.

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Next generation cosmic microwave background (CMB) polarization telescope will use large arrays of receiver with nearly 100 000 transition edge sensor (TES) detectors and receiving antennas. Such large TES and antenna array is a big challenge for the fabrication of TES and antennas. A 35-layers silicon-platelet corrugated horn for 70–110 GHz is designed and fabricated based on the micro electro mechanical system (MEMS) technology. Compared with the traditional corrugated horn, the last layer of the 35-layers silicon-platelet is designed with no corrugation to increase the beam symmetry. A parametric HFSS model of the horn was established to evaluate the performance of the horn and effect of fabrication process. The measured S11 and cross-polarization of the fabricated prototype horn are both below −20 dB while the sidelobe at 70 and 90 GHz is below −20 dB. The beam symmetry of the horn is good in 70–110 GHz band. The measured gain is greater than 15 dBi. These results show that the performance of the designed horn meets the requirement of CMB experiment.

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Fan, Jin0000-0002-4482-0196
Additional Information:© 2021 Wiley Periodicals LLC. Issue Online: 01 February 2022; Version of Record online: 04 December 2021; Manuscript accepted: 14 November 2021; Manuscript revised: 10 November 2021; Manuscript received: 29 September 2021. Funding information: National Natural Science Foundation of China, Grant/Award Numbers: 11653004, 11673024; Scientific Instrument Developing Project of the Chinese Academy of Sciences, Grant/Award Number: YJKYYQ20190065; Strategic Priority Research Program of the Chinese Academy of Science, Grant/Award Number: XDB23020000. Data Availability Statement: The data that support the findings of this study are available from the corresponding author upon reasonable request.
Funding AgencyGrant Number
National Natural Science Foundation of China11653004
National Natural Science Foundation of China11673024
Chinese Academy of SciencesYJKYYQ20190065
Chinese Academy of SciencesXDB23020000
Subject Keywords:cosmic microwave background (CMB); millimeter wave; corrugated horn; semiconductor fabrication
Issue or Number:3
Record Number:CaltechAUTHORS:20211221-506781300
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Official Citation:Feng, Z, Li, J-N, Li, Z-W, et al. Development of a 70–110 GHz silicon corrugated horn for cosmic microwave background experiment. Int J RF Microw Comput Aided Eng. 2022; 32(3):e22996. doi:10.1002/mmce.22996
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:112598
Deposited By: Tony Diaz
Deposited On:21 Dec 2021 19:51
Last Modified:14 Mar 2022 20:33

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