Liu, Yushuai and Gao, Zhiyuan and Lu, Yaoqing and Wu, Tao (2021) LiNbO₃ High Order Lamb Wave Resonators with Composite Plate Structure. In: 2021 IEEE International Ultrasonics Symposium (IUS). IEEE , Piscataway, NJ, pp. 1-4. ISBN 978-1-6654-0355-9. https://resolver.caltech.edu/CaltechAUTHORS:20220105-278608200
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Abstract
The paper demonstrates the design and analysis of high-order asymmetric (A) and symmetric (S) resonators with the structure of Z-cut Lithium Niobate (LiNbO₃) thin film and silicon oxide (SiO₂) layer. This structure can enable high frequency of more than 3.5 GHz of high-order A mode and S mode. It can also achieve high electromechanical coupling coefficient (kt2) of 22.1% in S² mode and 17.1% of A3 mode by setting the thickness ratio of LiNbO₃ thin film and SiO₂ layer in theory. Such a high coupling coefficient enables the large bandwidth of acoustic-based RF filters.
| Item Type: | Book Section | ||||||
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| Alternate Title: | LiNbO3 High Order Lamb Wave Resonators with Composite Plate Structure | ||||||
| Additional Information: | © 2021 IEEE. The authors appreciate the support from the Natural Science Foundation of Shanghai (19ZR1477000) and National Natural Science Foundation of China (61874073). | ||||||
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| Subject Keywords: | lithium niobate (LiNbO3), resonator, high coupling coefficient | ||||||
| DOI: | 10.1109/ius52206.2021.9593547 | ||||||
| Record Number: | CaltechAUTHORS:20220105-278608200 | ||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20220105-278608200 | ||||||
| Official Citation: | Y. Liu, Z. Gao, Y. Lu and T. Wu, "LiNbO3 High Order Lamb Wave Resonators with Composite Plate Structure," 2021 IEEE International Ultrasonics Symposium (IUS), 2021, pp. 1-4, doi: 10.1109/IUS52206.2021.9593547 | ||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||
| ID Code: | 112720 | ||||||
| Collection: | CaltechAUTHORS | ||||||
| Deposited By: | Tony Diaz | ||||||
| Deposited On: | 09 Jan 2022 21:34 | ||||||
| Last Modified: | 09 Jan 2022 21:34 |
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