A Caltech Library Service

Soft lithographic fabrication of microresonators

Armani, A. M. and Vahala, K. J. (2007) Soft lithographic fabrication of microresonators. In: Digest of the IEEE LEOS Summer Topical Meetings. Portland, OR, 23-25 July 2007. IEEE , Piscataway, NJ, pp. 133-134. ISBN 1-4244-0926-8.

PDF - Published Version
See Usage Policy.


Use this Persistent URL to link to this item:


Using ultra-high-Q toroid microcavity masters, soft lithography is applied to fabricate polymer microcavity arrays with Q factors in excess of 10^6. This technique produces resonators with material-limited quality factors.

Item Type:Book Section
Related URLs:
URLURL TypeDescription
Armani, A. M.0000-0001-9890-5104
Vahala, K. J.0000-0003-1783-1380
Additional Information:© Copyright 2007 IEEE. Reprinted with permission. Publication Date: 23-25 July 2007. The authors would like to thank Stevens Martin at AOC for the Vicast polymer resin used in this work. This work was supported by DARPA and the Caltech Lee Center. A.M.A is supported by a Clare Boothe Luce postdoctoral fellowship.
Funding AgencyGrant Number
Defense Advanced Research Projects AgencyUNSPECIFIED
Lee Center for Advanced Networking, CaltechUNSPECIFIED
Clare Booth Luce postdoctoral fellowshipUNSPECIFIED
Subject Keywords:Q-factor; microcavities; micromechanical resonators; soft lithography; microresonators; polymer microcavity arrays; toroid microcavity masters
Record Number:CaltechAUTHORS:ARMleos07
Persistent URL:
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:11479
Deposited By: Kristin Buxton
Deposited On:28 Aug 2008 03:20
Last Modified:10 Mar 2020 17:47

Repository Staff Only: item control page