Liu, W. S. and Lee, E. W. and Nicolet, M-A. and Arbet-Engels, V. and Wang, K. L. (1992) Importance of sample preheating in oxidation of GexSi1−x. Journal of Applied Physics, 71 (7). pp. 3626-3627. ISSN 0021-8979. doi:10.1063/1.350922. https://resolver.caltech.edu/CaltechAUTHORS:LIUjap92a
![[img]](https://authors.library.caltech.edu/style/images/fileicons/application_pdf.png)
|
PDF
- Published Version
See Usage Policy. 217kB |
Use this Persistent URL to link to this item: https://resolver.caltech.edu/CaltechAUTHORS:LIUjap92a
Abstract
Wet thermal oxidation at 1000 °C of a 470-nm-thick epitaxial Ge0.36Si0.64 layer on (100)Si produces oxides of different composition depending on the details of the oxidation procedure. When a cold sample is directly exposed to the hot steam, the surface layer of the oxide contains both Ge and Si. Only SiO2 forms if a preheated sample is exposed to the hot steam. The effect is not present for dry oxidation and is attributed to the known enhancement of the wet oxidation rate by Ge, coupled with the transient warm up of a sample when it is immersed cold in hot steam.
| Item Type: | Article | |||||||||
|---|---|---|---|---|---|---|---|---|---|---|
| Related URLs: |
| |||||||||
| Additional Information: | Copyright © 2008 American Institute of Physics. Received 9 September 1991; accepted 27 December 1991. This work was supported by the Semiconductor Research Corporation under a coordinated research program at Caltech (91-SJ-100) and at UCLA (91-SJ-088). We thank R. Gorris for technical assistance. | |||||||||
| Funders: |
| |||||||||
| Subject Keywords: | GERMANIUM SILICIDES, OXIDATION, HEAT TREATMENTS, EPITAXIAL LAYERS, CHEMICAL COMPOSITION, RBS, MOLECULAR BEAM EPITAXY | |||||||||
| Issue or Number: | 7 | |||||||||
| DOI: | 10.1063/1.350922 | |||||||||
| Record Number: | CaltechAUTHORS:LIUjap92a | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:LIUjap92a | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 11548 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | Archive Administrator | |||||||||
| Deposited On: | 04 Sep 2008 00:07 | |||||||||
| Last Modified: | 08 Nov 2021 22:00 |
Repository Staff Only: item control page
