Boland, Justin and Chao, Yuan-Heng and Suzuki, Yuji and Tai, Y. C. (2003) Micro electret power generator. In: International Conference on Micro Electro Mechanical Systems, 16th (MEMS-03) Kyoto, Japan, 19-23 January 2003. IEEE , Piscataway, NJ, pp. 538-541. ISBN 0-7803-7744-3. https://resolver.caltech.edu/CaltechAUTHORS:BOLmems03
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Abstract
We present the first micromachined rotational electret power generator, linearized theoretical model of electret power generation, and novel method to produce uniformly charged electret. We also improved our previously developed [1, 2] thin film Teflon AF 1601-S electret technology with respect to dielectric thickness, charge uniformity, and processability. In demonstration, our prototype power generator successfully generated > 25μW with electret thickness of 9μm, effective charge density of -2.8 x l0^-4 C/m^2, and rotational speed of 4170 RPM.
| Item Type: | Book Section | |||||||||
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| Additional Information: | © 2003 IEEE. Reprinted with permission. Publication Date: 19-23 January 2003. Date Published in Issue: 2003-04-02. | |||||||||
| Subject Keywords: | electrets; electric generators; small electric machines; charge uniformity; dielectric thickness; linearized theoretical model; micro electret power generator; micromachined rotational electret power generator; processability; thin film Teflon AF 1601-S electret technology | |||||||||
| DOI: | 10.1109/MEMSYS.2003.1189805 | |||||||||
| Record Number: | CaltechAUTHORS:BOLmems03 | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:BOLmems03 | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 11561 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | INVALID USER | |||||||||
| Deposited On: | 07 Sep 2008 04:54 | |||||||||
| Last Modified: | 08 Nov 2021 22:00 |
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