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Micro electret power generator

Boland, Justin and Chao, Yuan-Heng and Suzuki, Yuji and Tai, Y. C. (2003) Micro electret power generator. In: International Conference on Micro Electro Mechanical Systems, 16th (MEMS-03) Kyoto, Japan, 19-23 January 2003. IEEE , Piscataway, NJ, pp. 538-541. ISBN 0-7803-7744-3.

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We present the first micromachined rotational electret power generator, linearized theoretical model of electret power generation, and novel method to produce uniformly charged electret. We also improved our previously developed [1, 2] thin film Teflon AF 1601-S electret technology with respect to dielectric thickness, charge uniformity, and processability. In demonstration, our prototype power generator successfully generated > 25μW with electret thickness of 9μm, effective charge density of -2.8 x l0^-4 C/m^2, and rotational speed of 4170 RPM.

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Tai, Y. C.0000-0001-8529-106X
Additional Information:© 2003 IEEE. Reprinted with permission. Publication Date: 19-23 January 2003. Date Published in Issue: 2003-04-02.
Subject Keywords:electrets; electric generators; small electric machines; charge uniformity; dielectric thickness; linearized theoretical model; micro electret power generator; micromachined rotational electret power generator; processability; thin film Teflon AF 1601-S electret technology
Record Number:CaltechAUTHORS:BOLmems03
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:11561
Deposited On:07 Sep 2008 04:54
Last Modified:08 Nov 2021 22:00

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