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Commercialization of microcavity plasma devices and arrays: Systems for VUV photolithography and nanopatterning, disinfection of drinking water and air, and biofilm deactivation for medical therapeutics

Kim, Jinhong and Mironov, Andrey E. and Cho, Jin H. and Sievers, Dane S. and Herring, Cyrus M. and Park, Sehyun and Sun, Peter P. and Liang, Zhihu and Chen, Wenyuan and Park, Sung-Jin and Eden, J. Gary (2022) Commercialization of microcavity plasma devices and arrays: Systems for VUV photolithography and nanopatterning, disinfection of drinking water and air, and biofilm deactivation for medical therapeutics. Plasma Processes and Polymers . ISSN 1612-8850. doi:10.1002/ppap.202200075. (In Press) https://resolver.caltech.edu/CaltechAUTHORS:20220817-896613000

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Abstract

A little more than two decades after the introduction of the first microcavity plasma devices, a growing body of commercial products based on the remarkable properties of these low-temperature, atmospheric plasmas is now available. Following a brief review of early microplasma lamp development, this article describes microplasma-based devices and systems currently being manufactured for applications in photolithography, photopatterning, and other nanofabrication processes, such as atomic layer deposition, spectroscopic identification and analysis of materials (including wide bandgap crystals), the disinfection of drinking water in off-grid communities, deactivating COVID-19 and other pathogens in air and on surfaces in public spaces, and vacuum ultraviolet lamps for driving atomic clocks. The microplasma-based treatment of otitis media in the human ear will also be discussed.


Item Type:Article
Related URLs:
URLURL TypeDescription
https://doi.org/10.1002/ppap.202200075DOIArticle
ORCID:
AuthorORCID
Mironov, Andrey E.0000-0003-4974-8530
Additional Information:© 2022 The Authors. Plasma Processes and Polymers published by Wiley-VCH GmbH. This is an open access article under the terms of the Creative Commons Attribution License, which permits use, distribution and reproduction in any medium, provided the original work is properly cited. Version of Record online: 17 August 2022. Manuscript accepted: 24 June 2022. Manuscript revised: 17 June 2022. Manuscript received: 19 April 2022. Open Access Funding provided by Big Ten Academic Alliance hybrid - University of Illinois Urbana-Champaign within the TA16 Agreement. The support of the discovery and development of microcavity plasmas by the U.S. Air Force Office of Scientific Research (H. Schlossberg, J. Luginsland, J. Marshall, and M. Birkan), the National Institutes of Health, the U.S. Department of Energy, the Defense Advanced Research Projects Agency (DARPA), and the NASA Jet Propulsion Laboratory under grants FA9550-14-1-0002, 2R42AI125006-02A1, DE-SC0021718, and JPL No. 1562980, respectively, is gratefully acknowledged. Open Access Funding provided by Big Ten Academic Alliance hybrid - University of Illinois Urbana-Champaign within the TA16 Agreement. DATA AVAILABILITY STATEMENT. The data that support the findings of this study are available from the corresponding author upon reasonable request.
Funders:
Funding AgencyGrant Number
Air Force Office of Scientific Research (AFOSR)FA9550-14-1-0002
NIH2R42AI125006-02A1
Department of Energy (DOE)DE-SC0021718
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
JPL1562980
Big Ten Academic Alliance hybrid - University of Illinois Urbana-ChampaignTA-16
DOI:10.1002/ppap.202200075
Record Number:CaltechAUTHORS:20220817-896613000
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20220817-896613000
Official Citation:Kim, J., Mironov, A. E., Cho, J. H., Sievers, D. S., Herring, C. M., Park, S., Sun, P. P., Liang, Z., Chen, W., Park, S.-J., Eden, J. G., Plasma Processes Polym. 2022, e2200075. https://doi.org/10.1002/ppap.202200075
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:116349
Collection:CaltechAUTHORS
Deposited By: George Porter
Deposited On:18 Aug 2022 20:11
Last Modified:18 Aug 2022 20:11

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