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Nano-electromechanical spatial light modulator enabled by asymmetric resonant dielectric metasurfaces

Kwon, Hyounghan and Zheng, Tianzhe and Faraon, Andrei (2022) Nano-electromechanical spatial light modulator enabled by asymmetric resonant dielectric metasurfaces. Nature Communications, 13 (1). Art. No. 5811. ISSN 2041-1723. doi:10.1038/s41467-022-33449-9.

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Spatial light modulators (SLMs) play essential roles in various free-space optical technologies, offering spatio-temporal control of amplitude, phase, or polarization of light. Beyond conventional SLMs based on liquid crystals or microelectromechanical systems, active metasurfaces are considered as promising SLM platforms because they could simultaneously provide high-speed and small pixel size. However, the active metasurfaces reported so far have achieved either limited phase modulation or low efficiency. Here, we propose nano-electromechanically tunable asymmetric dielectric metasurfaces as a platform for reflective SLMs. Exploiting the strong asymmetric radiation of perturbed high-order Mie resonances, the metasurfaces experimentally achieve a phase-shift close to 290∘, over 50% reflectivity, and a wavelength-scale pixel size. Electrical control of diffraction patterns is also achieved by displacing the Mie resonators using nano-electro-mechanical forces. This work paves the ways for future exploration of the asymmetric metasurfaces and for their application to the next-generation SLMs.

Item Type:Article
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URLURL TypeDescription
Kwon, Hyounghan0000-0002-9257-687X
Zheng, Tianzhe0000-0001-7058-5196
Faraon, Andrei0000-0002-8141-391X
Additional Information:This work was supported by the National Institutes of Health (NIH) brain initiative program, grant NIH 1R21EY029460-01. The device nanofabrication was performed at the Kavli Nanoscience Institute at Caltech. H.K. acknowledges a fellowship from Ilju organization.
Group:Kavli Nanoscience Institute
Funding AgencyGrant Number
Kavli Nanoscience InstituteUNSPECIFIED
Ilju Foundation of Education & CultureUNSPECIFIED
Issue or Number:1
Record Number:CaltechAUTHORS:20221019-342695600.2
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:117491
Deposited By: Research Services Depository
Deposited On:27 Oct 2022 22:05
Last Modified:27 Oct 2022 22:05

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