Williams, R. Stanley and Paine, B. M. and Schaffer, W. J. and Kowalczyk, S. P. (1982) Channeling measurements of lattice disorder at the GaAs–InAs(100) heterojunction. Journal of Vacuum Science and Technology, 21 (2). pp. 386-388. ISSN 0022-5355. doi:10.1116/1.571787. https://resolver.caltech.edu/CaltechAUTHORS:WILjvst82a
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Abstract
Rutherford backscattering spectrometry (RBS) combined with channeling techniques has been used to analyze the lattice disorder present in InAs thin films less than 1 µm thick grown on GaAs(100) substrates by molecular beam epitaxy (MBE). The axial channeling yields along [100], [110], and [111] reveal that roughly one quarter of the atoms in the thin films are out of registry with the InAs lattice at the heterojunction interface. The amount of lattice disorder decreases rapidly to undetectable (<1%) amounts at film thicknesses greater than 0.5 µm. The interface disorder arises as a result of the >7% lattice mismatch between GaAs and InAs.
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| Additional Information: | © 1982 American Vacuum Society. Received 1 February 1982; accepted 12 April 1982. This work was supported in part by Wright-Patterson Air Force Aeronautical Laboratories under Contract No. F33615-80-C-1052. It was also supported in part by the Advanced Research Project Agency of the Department of Defense and monitored by the Air Force Office of Scientific Research under Contract No. F-49620-77-C-0087. | ||||||||
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| Subject Keywords: | HETEROJUNCTIONS, GALLIUM ARSENIDES, INDIUM, EPITAXY, BACKSCATTERING, THIN FILMS, LATTICE PARAMETERS, RUTHERFORD SCATTERING, ION CHANNELING, HELIUM IONS, MEV RANGE 01–10, CRYSTAL DEFECTS | ||||||||
| Issue or Number: | 2 | ||||||||
| DOI: | 10.1116/1.571787 | ||||||||
| Record Number: | CaltechAUTHORS:WILjvst82a | ||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:WILjvst82a | ||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||||
| ID Code: | 11924 | ||||||||
| Collection: | CaltechAUTHORS | ||||||||
| Deposited By: | Archive Administrator | ||||||||
| Deposited On: | 09 Oct 2008 23:29 | ||||||||
| Last Modified: | 08 Nov 2021 22:23 |
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